JPS6011095U - XY stage - Google Patents

XY stage

Info

Publication number
JPS6011095U
JPS6011095U JP10293783U JP10293783U JPS6011095U JP S6011095 U JPS6011095 U JP S6011095U JP 10293783 U JP10293783 U JP 10293783U JP 10293783 U JP10293783 U JP 10293783U JP S6011095 U JPS6011095 U JP S6011095U
Authority
JP
Japan
Prior art keywords
stage
arm
guide groove
deployment
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10293783U
Other languages
Japanese (ja)
Inventor
定夫 杉山
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to JP10293783U priority Critical patent/JPS6011095U/en
Publication of JPS6011095U publication Critical patent/JPS6011095U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は平面図、第２図は第１図Ａ−Ａ線に沿う断面図
、第３図は従来装置の平面図、第４図はＢ−Ｂ線断面図
である。 １・・・・・・定盤、２，３・・・・・・スライドアー
ム、２２・・・・・・ガイド溝、４・・・・・・ステー
ジ、４１，４２゜４３・・・・・・空気軸受。1 is a plan view, FIG. 2 is a cross-sectional view taken along the line A--A in FIG. 1, FIG. 3 is a plan view of the conventional device, and FIG. 4 is a cross-sectional view taken along the line B--B. 1... Surface plate, 2, 3... Slide arm, 22... Guide groove, 4... Stage, 41, 42° 43... ...Air bearing.

Claims (1)

【実用新案登録請求の範囲】 定盤上へ縦横直交し且つ直交方向に往復動自在なスライ
ドアームを配備してその交叉部にステージを設けたＸＹ
ステージにおいて、一方のスライドアームには長手方向
に沿いガイド溝を開設すると共に、ステージには他方の
アームの一側ではガイド溝に位置し、他側ではアーム両
側に位置して夫々静圧空気軸受を配備したことを特徴と
する＼ｔ ＸＹステージ。[Scope of claim for utility model registration]
In the stage, one slide arm has a guide groove along its length, and the stage has hydrostatic air bearings located in the guide groove on one side of the other arm and on both sides of the arm on the other side. The XY stage is characterized by the deployment of.
JP10293783U 1983-07-02 1983-07-02 XY stage Pending JPS6011095U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10293783U JPS6011095U (en) 1983-07-02 1983-07-02 XY stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10293783U JPS6011095U (en) 1983-07-02 1983-07-02 XY stage

Publications (1)

Publication Number Publication Date
JPS6011095U true JPS6011095U (en) 1985-01-25

Family

ID=30242395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10293783U Pending JPS6011095U (en) 1983-07-02 1983-07-02 XY stage

Country Status (1)

Country Link
JP (1) JPS6011095U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103255U (en) * 1990-02-09 1991-10-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103255U (en) * 1990-02-09 1991-10-28

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