JPS5940360U - sputtering equipment - Google Patents
sputtering equipmentInfo
- Publication number
- JPS5940360U JPS5940360U JP13564982U JP13564982U JPS5940360U JP S5940360 U JPS5940360 U JP S5940360U JP 13564982 U JP13564982 U JP 13564982U JP 13564982 U JP13564982 U JP 13564982U JP S5940360 U JPS5940360 U JP S5940360U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering equipment
- sputtering device
- target
- recorded
- receiving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のスパッタリング装置の構造を略示する図
、第２図は本考案に係るスパッタリング装置の一実施例
の断面を略示する図、第３図は第２図に示したスパッタ
リング装置の受は板の斜視図である。
１・・・ターゲット、３・・・真空チャンバ、４・・・
成膜室、５・・・冷却槽、６・・・冷却水、７・・・受
は板、７１・・・細溝、７２・・・排気孔、７３．７５
・・・０リング、７４・・・ネジ穴。FIG. 1 is a diagram schematically showing the structure of a conventional sputtering device, FIG. 2 is a diagram schematically showing a cross section of an embodiment of the sputtering device according to the present invention, and FIG. 3 is a diagram schematically showing the sputtering device shown in FIG. 2. The receiver is a perspective view of the plate. 1...Target, 3...Vacuum chamber, 4...
Film forming chamber, 5... Cooling tank, 6... Cooling water, 7... Receiving plate, 71... Thin groove, 72... Exhaust hole, 73.75
...0 ring, 74...screw hole.
Claims (1)
ことを特徴とするスパッタリング装置。A sputtering device characterized in that the receiving plate is equipped with means for vacuum suctioning a target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13564982U JPS5940360U (en) | 1982-09-06 | 1982-09-06 | sputtering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13564982U JPS5940360U (en) | 1982-09-06 | 1982-09-06 | sputtering equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5940360U true JPS5940360U (en) | 1984-03-15 |
Family
ID=30305256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13564982U Pending JPS5940360U (en) | 1982-09-06 | 1982-09-06 | sputtering equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5940360U (en) |
-
1982
- 1982-09-06 JP JP13564982U patent/JPS5940360U/en active Pending
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