JPS5933248U - Wafer face alignment equipment - Google Patents

Wafer face alignment equipment

Info

Publication number
JPS5933248U
JPS5933248U JP12852882U JP12852882U JPS5933248U JP S5933248 U JPS5933248 U JP S5933248U JP 12852882 U JP12852882 U JP 12852882U JP 12852882 U JP12852882 U JP 12852882U JP S5933248 U JPS5933248 U JP S5933248U
Authority
JP
Japan
Prior art keywords
wafer
facet
face alignment
wafer face
alignment equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12852882U
Other languages
Japanese (ja)
Other versions
JPS6211001Y2 (en
Inventor
善之 三橋
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP12852882U priority Critical patent/JPS5933248U/en
Publication of JPS5933248U publication Critical patent/JPS5933248U/en
Application granted granted Critical
Publication of JPS6211001Y2 publication Critical patent/JPS6211001Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案装置の全体斜視図、第２図はその要部の
斜視図、第３図はその平面図、第４図はセンサの拡大斜
視図である。 １・・・真空室、２・・・ウェハ、２ａ・・・ファセッ
ト、２ｂ・・・周縁、３・・・テーブル、４．４・・・
アーム、５゜５・・・センサ。 Ａ図FIG. 1 is an overall perspective view of the device of the present invention, FIG. 2 is a perspective view of its essential parts, FIG. 3 is a plan view thereof, and FIG. 4 is an enlarged perspective view of the sensor. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 2... Wafer, 2a... Facet, 2b... Periphery, 3... Table, 4.4...
Arm, 5°5...sensor. A diagram

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空室１内にファセット２ａを備えた略円形のウェハ２
を載置して昇降と回転自在のテーブル３を設け、該テー
ブル３の外周に該ウェハ２の周縁２ｂを押圧する開閉自
在のアーム４．４と、該ファセット２ａを介しての光線
を受光して該テーブル３の回転を停止させる２組のセン
サ５．５を設けて成るウェハのファセット合せ装置。　
　　笛A substantially circular wafer 2 with a facet 2a inside a vacuum chamber 1
A table 3 on which a wafer is placed is provided which can be raised and lowered and rotated freely, and an arm 4.4 which can be opened and closed to press the peripheral edge 2b of the wafer 2 on the outer periphery of the table 3, and which receives the light beam through the facet 2a. A wafer facet alignment device comprising two sets of sensors 5.5 for stopping the rotation of the table 3.
whistle
JP12852882U 1982-08-27 1982-08-27 Wafer face alignment equipment Granted JPS5933248U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12852882U JPS5933248U (en) 1982-08-27 1982-08-27 Wafer face alignment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12852882U JPS5933248U (en) 1982-08-27 1982-08-27 Wafer face alignment equipment

Publications (2)

Publication Number Publication Date
JPS5933248U true JPS5933248U (en) 1984-03-01
JPS6211001Y2 JPS6211001Y2 (en) 1987-03-16

Family

ID=30291534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12852882U Granted JPS5933248U (en) 1982-08-27 1982-08-27 Wafer face alignment equipment

Country Status (1)

Country Link
JP (1) JPS5933248U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133578U (en) * 1977-03-30 1978-10-23
JPS5565445A (en) * 1978-11-13 1980-05-16 Toshiba Corp Positioning device for plate-shaped body
JPS55149951U (en) * 1979-04-16 1980-10-29

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133578U (en) * 1977-03-30 1978-10-23
JPS5565445A (en) * 1978-11-13 1980-05-16 Toshiba Corp Positioning device for plate-shaped body
JPS55149951U (en) * 1979-04-16 1980-10-29

Also Published As

Publication number Publication date
JPS6211001Y2 (en) 1987-03-16

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