JPH0373451U - - Google Patents

Info

Publication number
JPH0373451U
JPH0373451U JP12413490U JP12413490U JPH0373451U JP H0373451 U JPH0373451 U JP H0373451U JP 12413490 U JP12413490 U JP 12413490U JP 12413490 U JP12413490 U JP 12413490U JP H0373451 U JPH0373451 U JP H0373451U
Authority
JP
Japan
Prior art keywords
image
optical axis
optical
imaging
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12413490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0537476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPH0373451U publication Critical patent/JPH0373451U/ja
Application granted granted Critical
Publication of JPH0537476Y2 publication Critical patent/JPH0537476Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1990124134U 1984-02-22 1990-11-26 Expired - Lifetime JPH0537476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US58259084A 1984-02-22 1984-02-22

Publications (2)

Publication Number Publication Date
JPH0373451U true JPH0373451U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-07-24
JPH0537476Y2 JPH0537476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-22

Family

ID=24329741

Family Applications (2)

Application Number Title Priority Date Filing Date
JP60032947A Pending JPS60194537A (ja) 1984-02-22 1985-02-22 整列装置
JP1990124134U Expired - Lifetime JPH0537476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-02-22 1990-11-26

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP60032947A Pending JPS60194537A (ja) 1984-02-22 1985-02-22 整列装置

Country Status (1)

Country Link
JP (2) JPS60194537A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012064608A (ja) * 2010-09-14 2012-03-29 Hitachi High-Technologies Corp 検査装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262538A (ja) * 1985-09-13 1987-03-19 Toshiba Corp 位置決め装置
JPH0625011Y2 (ja) * 1988-02-15 1994-06-29 株式会社東京精密 半導体チップの基準線検出装置
JP2015226043A (ja) * 2014-05-30 2015-12-14 株式会社ディスコ ウェーハｉｄ読み取り装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159876A (en) * 1978-06-07 1979-12-18 Nec Corp Wafer position detection method and its unit
JPS56134741A (en) * 1980-03-25 1981-10-21 Toshiba Corp Position detecting device
JPS574134A (en) * 1980-06-10 1982-01-09 Fujitsu Ltd Recognizing device
JPS57167651A (en) * 1981-04-07 1982-10-15 Mitsubishi Electric Corp Inspecting device for surface of semiconductor wafer
JPS57169251A (en) * 1981-04-09 1982-10-18 Toshiba Corp Recognizing device for position
JPS57198641A (en) * 1981-05-30 1982-12-06 Toshiba Corp Pattern detection
JPS5919344A (ja) * 1982-07-23 1984-01-31 Hitachi Ltd ２視野光学装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133428A (en) * 1981-02-12 1982-08-18 Nippon Kogaku Kk <Nikon> Alignment optical system capable of variable magnification

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159876A (en) * 1978-06-07 1979-12-18 Nec Corp Wafer position detection method and its unit
JPS56134741A (en) * 1980-03-25 1981-10-21 Toshiba Corp Position detecting device
JPS574134A (en) * 1980-06-10 1982-01-09 Fujitsu Ltd Recognizing device
JPS57167651A (en) * 1981-04-07 1982-10-15 Mitsubishi Electric Corp Inspecting device for surface of semiconductor wafer
JPS57169251A (en) * 1981-04-09 1982-10-18 Toshiba Corp Recognizing device for position
JPS57198641A (en) * 1981-05-30 1982-12-06 Toshiba Corp Pattern detection
JPS5919344A (ja) * 1982-07-23 1984-01-31 Hitachi Ltd ２視野光学装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012064608A (ja) * 2010-09-14 2012-03-29 Hitachi High-Technologies Corp 検査装置

Also Published As

Publication number Publication date
JPS60194537A (ja) 1985-10-03
JPH0537476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-22

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