JPH0370900B2 - - Google Patents

Info

Publication number
JPH0370900B2
JPH0370900B2 JP61106824A JP10682486A JPH0370900B2 JP H0370900 B2 JPH0370900 B2 JP H0370900B2 JP 61106824 A JP61106824 A JP 61106824A JP 10682486 A JP10682486 A JP 10682486A JP H0370900 B2 JPH0370900 B2 JP H0370900B2
Authority
JP
Japan
Prior art keywords
board
wafer
probe card
prober
head plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61106824A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62263647A (ja
Inventor
Keiichi Yokota
Kazuhisa Okada
Shigeru Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Mitsubishi Electric Corp
Original Assignee
Tokyo Electron Ltd
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Mitsubishi Electric Corp filed Critical Tokyo Electron Ltd
Priority to JP61106824A priority Critical patent/JPS62263647A/ja
Publication of JPS62263647A publication Critical patent/JPS62263647A/ja
Publication of JPH0370900B2 publication Critical patent/JPH0370900B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
JP61106824A 1986-05-12 1986-05-12 ウエハプロ−バ Granted JPS62263647A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61106824A JPS62263647A (ja) 1986-05-12 1986-05-12 ウエハプロ−バ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61106824A JPS62263647A (ja) 1986-05-12 1986-05-12 ウエハプロ−バ

Publications (2)

Publication Number Publication Date
JPS62263647A JPS62263647A (ja) 1987-11-16
JPH0370900B2 true JPH0370900B2 (enEXAMPLES) 1991-11-11

Family

ID=14443524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61106824A Granted JPS62263647A (ja) 1986-05-12 1986-05-12 ウエハプロ−バ

Country Status (1)

Country Link
JP (1) JPS62263647A (enEXAMPLES)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2599939B2 (ja) * 1987-11-30 1997-04-16 東京エレクトロン株式会社 プローブ装置及びプローブ方法
JP2626772B2 (ja) * 1987-12-01 1997-07-02 東京エレクトロン株式会社 プローブ装置
JP2828989B2 (ja) * 1988-04-08 1998-11-25 東京エレクトロン株式会社 半導体ウェハプローバ
JP2726899B2 (ja) * 1988-06-27 1998-03-11 東京エレクトロン株式会社 プローブ装置
JPH02224260A (ja) * 1988-11-02 1990-09-06 Tokyo Electron Ltd 位置合わせ方法
US5148103A (en) * 1990-10-31 1992-09-15 Hughes Aircraft Company Apparatus for testing integrated circuits
EP0707214A3 (en) * 1994-10-14 1997-04-16 Hughes Aircraft Co Multiport membrane probe to test complete semiconductor plates
US5642054A (en) * 1995-08-08 1997-06-24 Hughes Aircraft Company Active circuit multi-port membrane probe for full wafer testing
JP4123408B2 (ja) * 2001-12-13 2008-07-23 東京エレクトロン株式会社 プローブカード交換装置
JP4998791B2 (ja) * 2007-10-25 2012-08-15 横河電機株式会社 半導体試験装置
JP6425027B2 (ja) * 2015-03-24 2018-11-21 株式会社東京精密 プローバ及びウエハチャック温度測定方法
JP7287250B2 (ja) * 2019-11-18 2023-06-06 三菱電機株式会社 試験装置及び試験方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196029A (ja) * 1982-05-11 1983-11-15 Nec Corp プロ−ブカ−ド切替装置
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置

Also Published As

Publication number Publication date
JPS62263647A (ja) 1987-11-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees