JPH0370330B2 - - Google Patents
Info
- Publication number
- JPH0370330B2 JPH0370330B2 JP56210000A JP21000081A JPH0370330B2 JP H0370330 B2 JPH0370330 B2 JP H0370330B2 JP 56210000 A JP56210000 A JP 56210000A JP 21000081 A JP21000081 A JP 21000081A JP H0370330 B2 JPH0370330 B2 JP H0370330B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- films
- sides
- photoresist
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 25
- 239000011521 glass Substances 0.000 description 13
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21000081A JPS58115707A (ja) | 1981-12-28 | 1981-12-28 | 両面電極基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21000081A JPS58115707A (ja) | 1981-12-28 | 1981-12-28 | 両面電極基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58115707A JPS58115707A (ja) | 1983-07-09 |
| JPH0370330B2 true JPH0370330B2 (de) | 1991-11-07 |
Family
ID=16582189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21000081A Granted JPS58115707A (ja) | 1981-12-28 | 1981-12-28 | 両面電極基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58115707A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0652703B2 (ja) * | 1984-04-10 | 1994-07-06 | 松下電器産業株式会社 | 二面露光方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5094497A (de) * | 1973-12-24 | 1975-07-28 |
-
1981
- 1981-12-28 JP JP21000081A patent/JPS58115707A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5094497A (de) * | 1973-12-24 | 1975-07-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58115707A (ja) | 1983-07-09 |
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