JPH0370325B2 - - Google Patents
Info
- Publication number
- JPH0370325B2 JPH0370325B2 JP56129227A JP12922781A JPH0370325B2 JP H0370325 B2 JPH0370325 B2 JP H0370325B2 JP 56129227 A JP56129227 A JP 56129227A JP 12922781 A JP12922781 A JP 12922781A JP H0370325 B2 JPH0370325 B2 JP H0370325B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- container
- antimony
- compound
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12922781A JPS5830005A (ja) | 1981-08-17 | 1981-08-17 | 透明電導膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12922781A JPS5830005A (ja) | 1981-08-17 | 1981-08-17 | 透明電導膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5830005A JPS5830005A (ja) | 1983-02-22 |
| JPH0370325B2 true JPH0370325B2 (enExample) | 1991-11-07 |
Family
ID=15004295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12922781A Granted JPS5830005A (ja) | 1981-08-17 | 1981-08-17 | 透明電導膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5830005A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139321A (ja) * | 1984-07-30 | 1986-02-25 | 株式会社半導体エネルギー研究所 | 酸化スズ導電膜の作製方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5061695A (enExample) * | 1973-10-02 | 1975-05-27 | ||
| JPS5167994A (ja) * | 1974-12-09 | 1976-06-12 | Sharp Kk | Handotaimakuseizosochi |
| JPS6018090B2 (ja) * | 1979-10-03 | 1985-05-08 | 日本板硝子株式会社 | 導電薄膜の形成方法 |
| US4293594A (en) * | 1980-08-22 | 1981-10-06 | Westinghouse Electric Corp. | Method for forming conductive, transparent coating on a substrate |
-
1981
- 1981-08-17 JP JP12922781A patent/JPS5830005A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5830005A (ja) | 1983-02-22 |
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