JPH0369809B2 - - Google Patents

Info

Publication number
JPH0369809B2
JPH0369809B2 JP23404985A JP23404985A JPH0369809B2 JP H0369809 B2 JPH0369809 B2 JP H0369809B2 JP 23404985 A JP23404985 A JP 23404985A JP 23404985 A JP23404985 A JP 23404985A JP H0369809 B2 JPH0369809 B2 JP H0369809B2
Authority
JP
Japan
Prior art keywords
arm
plate
carriage
horizontally
horizontal moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23404985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6293112A (ja
Inventor
Kazuo Kimata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP23404985A priority Critical patent/JPS6293112A/ja
Publication of JPS6293112A publication Critical patent/JPS6293112A/ja
Publication of JPH0369809B2 publication Critical patent/JPH0369809B2/ja
Granted legal-status Critical Current

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  • Reciprocating Conveyors (AREA)
JP23404985A 1985-10-18 1985-10-18 搬送装置 Granted JPS6293112A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23404985A JPS6293112A (ja) 1985-10-18 1985-10-18 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23404985A JPS6293112A (ja) 1985-10-18 1985-10-18 搬送装置

Publications (2)

Publication Number Publication Date
JPS6293112A JPS6293112A (ja) 1987-04-28
JPH0369809B2 true JPH0369809B2 (cs) 1991-11-05

Family

ID=16964768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23404985A Granted JPS6293112A (ja) 1985-10-18 1985-10-18 搬送装置

Country Status (1)

Country Link
JP (1) JPS6293112A (cs)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63300006A (ja) * 1987-05-29 1988-12-07 Metsukusu:Kk 搬送装置
JPS6428912A (en) * 1987-07-24 1989-01-31 Hitachi Electr Eng Wafer handling device
JPH0652754B2 (ja) * 1987-10-23 1994-07-06 東京エレクトロン九州株式会社 基板搬送機構
JP2926592B2 (ja) * 1988-02-12 1999-07-28 東京エレクトロン株式会社 基板処理装置
JPH0724337Y2 (ja) * 1989-08-04 1995-06-05 大日本スクリーン製造株式会社 基板搬送装置
JPH06169003A (ja) * 1992-11-27 1994-06-14 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2859173B2 (ja) * 1995-08-31 1999-02-17 芝浦メカトロニクス株式会社 ロ−デイング装置
CN111099278B (zh) * 2018-05-28 2021-11-09 山东大东联石油设备有限公司 一种物品输送装置

Also Published As

Publication number Publication date
JPS6293112A (ja) 1987-04-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees