JPH0366819B2 - - Google Patents
Info
- Publication number
- JPH0366819B2 JPH0366819B2 JP57078921A JP7892182A JPH0366819B2 JP H0366819 B2 JPH0366819 B2 JP H0366819B2 JP 57078921 A JP57078921 A JP 57078921A JP 7892182 A JP7892182 A JP 7892182A JP H0366819 B2 JPH0366819 B2 JP H0366819B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- reaction chamber
- plasma reaction
- substrate
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/107—Continuous treatment of the devices, e.g. roll-to roll processes or multi-chamber deposition
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57078921A JPS58196063A (ja) | 1982-05-10 | 1982-05-10 | 光起電力素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57078921A JPS58196063A (ja) | 1982-05-10 | 1982-05-10 | 光起電力素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58196063A JPS58196063A (ja) | 1983-11-15 |
| JPH0366819B2 true JPH0366819B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-18 |
Family
ID=13675315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57078921A Granted JPS58196063A (ja) | 1982-05-10 | 1982-05-10 | 光起電力素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58196063A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4593644A (en) * | 1983-10-26 | 1986-06-10 | Rca Corporation | Continuous in-line deposition system |
| US5780313A (en) * | 1985-02-14 | 1998-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating semiconductor device |
| US4693777A (en) * | 1984-11-30 | 1987-09-15 | Kabushiki Kaisha Toshiba | Apparatus for producing semiconductor devices |
| JPS6324614A (ja) * | 1986-07-16 | 1988-02-02 | Mitsubishi Electric Corp | 半導体製造装置 |
| US5016562A (en) * | 1988-04-27 | 1991-05-21 | Glasstech Solar, Inc. | Modular continuous vapor deposition system |
| JPH02224221A (ja) * | 1989-02-27 | 1990-09-06 | Hitachi Ltd | 半導体装置製造方法、基板処理装置および半導体装置製造装置 |
| TW237562B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-11-09 | 1995-01-01 | Semiconductor Energy Res Co Ltd | |
| US6719848B2 (en) * | 2001-08-16 | 2004-04-13 | First Solar, Llc | Chemical vapor deposition system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4400409A (en) * | 1980-05-19 | 1983-08-23 | Energy Conversion Devices, Inc. | Method of making p-doped silicon films |
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1982
- 1982-05-10 JP JP57078921A patent/JPS58196063A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58196063A (ja) | 1983-11-15 |