JPH036218B2 - - Google Patents
Info
- Publication number
- JPH036218B2 JPH036218B2 JP24183184A JP24183184A JPH036218B2 JP H036218 B2 JPH036218 B2 JP H036218B2 JP 24183184 A JP24183184 A JP 24183184A JP 24183184 A JP24183184 A JP 24183184A JP H036218 B2 JPH036218 B2 JP H036218B2
- Authority
- JP
- Japan
- Prior art keywords
- target material
- composite target
- sintered composite
- weight
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013077 target material Substances 0.000 claims description 62
- 239000002131 composite material Substances 0.000 claims description 48
- 238000009792 diffusion process Methods 0.000 claims description 24
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 22
- 150000002910 rare earth metals Chemical class 0.000 claims description 22
- 229910045601 alloy Inorganic materials 0.000 claims description 21
- 239000000956 alloy Substances 0.000 claims description 21
- 229910052723 transition metal Inorganic materials 0.000 claims description 19
- 150000003624 transition metals Chemical class 0.000 claims description 19
- 239000002923 metal particle Substances 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 5
- 229910052691 Erbium Inorganic materials 0.000 claims description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 5
- 229910052689 Holmium Inorganic materials 0.000 claims description 5
- 229910052775 Thulium Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052771 Terbium Inorganic materials 0.000 claims description 4
- 239000000843 powder Substances 0.000 description 33
- 239000002245 particle Substances 0.000 description 32
- 238000004544 sputter deposition Methods 0.000 description 32
- 239000000203 mixture Substances 0.000 description 25
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 24
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 229910052760 oxygen Inorganic materials 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 230000035939 shock Effects 0.000 description 12
- 239000012071 phase Substances 0.000 description 10
- 238000001755 magnetron sputter deposition Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001000 micrograph Methods 0.000 description 5
- 229910001117 Tb alloy Inorganic materials 0.000 description 4
- 230000005415 magnetization Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 229910001279 Dy alloy Inorganic materials 0.000 description 3
- 229910017061 Fe Co Inorganic materials 0.000 description 3
- 229910000640 Fe alloy Inorganic materials 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000009472 formulation Methods 0.000 description 3
- 229910000765 intermetallic Inorganic materials 0.000 description 3
- -1 iron group metals Chemical class 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910001106 Ho alloy Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000767 Tm alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24183184A JPS61119648A (ja) | 1984-11-16 | 1984-11-16 | 焼結複合タ−ゲツト材 |
| US06/787,529 US4620872A (en) | 1984-10-18 | 1985-10-15 | Composite target material and process for producing the same |
| DE19853537191 DE3537191A1 (de) | 1984-10-18 | 1985-10-18 | Verbundtargetmaterial und verfahren zu seiner herstellung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24183184A JPS61119648A (ja) | 1984-11-16 | 1984-11-16 | 焼結複合タ−ゲツト材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61119648A JPS61119648A (ja) | 1986-06-06 |
| JPH036218B2 true JPH036218B2 (fr) | 1991-01-29 |
Family
ID=17080143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24183184A Granted JPS61119648A (ja) | 1984-10-18 | 1984-11-16 | 焼結複合タ−ゲツト材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61119648A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150037500A (ko) * | 2013-09-30 | 2015-04-08 | 가부시키가이샤 스크린 홀딩스 | 전자 디바이스용 구조체, 플라즈마 cvd 장치, 및 성막 방법 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62256962A (ja) * | 1986-04-30 | 1987-11-09 | Mitsubishi Metal Corp | 光磁気記録媒体形成用スパツタリングタ−ゲツト材 |
| JPH0768612B2 (ja) * | 1987-04-20 | 1995-07-26 | 日立金属株式会社 | 希土類金属―鉄族金属ターゲット用合金粉末、希土類金属―鉄族金属ターゲット、およびそれらの製造方法 |
| JPS63274764A (ja) * | 1987-04-30 | 1988-11-11 | Sumitomo Metal Mining Co Ltd | 光磁気記録用合金タ−ゲツト |
| JP2744991B2 (ja) * | 1987-11-27 | 1998-04-28 | 松下電器産業株式会社 | スパッタリングターゲット |
| JP2988021B2 (ja) * | 1991-06-12 | 1999-12-06 | 三菱マテリアル株式会社 | 透磁率の低い光磁気記録薄膜形成用高強度ターゲット材 |
-
1984
- 1984-11-16 JP JP24183184A patent/JPS61119648A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150037500A (ko) * | 2013-09-30 | 2015-04-08 | 가부시키가이샤 스크린 홀딩스 | 전자 디바이스용 구조체, 플라즈마 cvd 장치, 및 성막 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61119648A (ja) | 1986-06-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |