JPH0359752B2 - - Google Patents
Info
- Publication number
- JPH0359752B2 JPH0359752B2 JP61067437A JP6743786A JPH0359752B2 JP H0359752 B2 JPH0359752 B2 JP H0359752B2 JP 61067437 A JP61067437 A JP 61067437A JP 6743786 A JP6743786 A JP 6743786A JP H0359752 B2 JPH0359752 B2 JP H0359752B2
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- manufacturing
- grooved substrate
- substrate according
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 28
- 239000011248 coating agent Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 229920001223 polyethylene glycol Polymers 0.000 claims description 8
- 150000002902 organometallic compounds Chemical class 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002202 Polyethylene glycol Substances 0.000 claims description 4
- 239000002562 thickening agent Substances 0.000 claims description 4
- 239000006223 plastic coating Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000012467 final product Substances 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61067437A JPS62225273A (ja) | 1986-03-26 | 1986-03-26 | 溝つき基板の製造方法 |
| US07/030,892 US4810547A (en) | 1986-03-26 | 1987-03-26 | Substrate with fine grooves and method for manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61067437A JPS62225273A (ja) | 1986-03-26 | 1986-03-26 | 溝つき基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62225273A JPS62225273A (ja) | 1987-10-03 |
| JPH0359752B2 true JPH0359752B2 (en:Method) | 1991-09-11 |
Family
ID=13344900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61067437A Granted JPS62225273A (ja) | 1986-03-26 | 1986-03-26 | 溝つき基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62225273A (en:Method) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101701A (ja) * | 1990-05-24 | 1991-04-26 | Nippon Sheet Glass Co Ltd | 微細パターン付き基板の製造方法 |
| CN1319191A (zh) | 1999-08-04 | 2001-10-24 | 日本板硝子株式会社 | 阶梯状衍射光栅及光波导元件 |
| JP4362255B2 (ja) | 1999-09-16 | 2009-11-11 | 日本板硝子株式会社 | 所定表面形状を有する物品の製造方法および光導波路素子 |
| JP2001240800A (ja) | 2000-02-25 | 2001-09-04 | Nippon Sheet Glass Co Ltd | 所定表面形状を有する物品の製造方法 |
| US6849350B2 (en) | 2001-02-28 | 2005-02-01 | Nippon Sheet Glass Co., Ltd. | Article having a predetermined surface shape and method for preparation thereof |
| JP2008279597A (ja) | 2006-05-10 | 2008-11-20 | Oji Paper Co Ltd | 凹凸パターン形成シートおよびその製造方法、反射防止体、位相差板、工程シート原版ならびに光学素子の製造方法 |
| EP1935929B1 (en) * | 2006-12-19 | 2011-11-30 | Evonik Degussa GmbH | Sol gel process for producing protective films for polymeric substrates |
| JP2012099731A (ja) * | 2010-11-04 | 2012-05-24 | Ulvac Japan Ltd | 基板の製造方法 |
-
1986
- 1986-03-26 JP JP61067437A patent/JPS62225273A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62225273A (ja) | 1987-10-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |