JPH0358531B2 - - Google Patents

Info

Publication number
JPH0358531B2
JPH0358531B2 JP61253219A JP25321986A JPH0358531B2 JP H0358531 B2 JPH0358531 B2 JP H0358531B2 JP 61253219 A JP61253219 A JP 61253219A JP 25321986 A JP25321986 A JP 25321986A JP H0358531 B2 JPH0358531 B2 JP H0358531B2
Authority
JP
Japan
Prior art keywords
film
etching
polycrystalline silicon
mask material
overhang
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61253219A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6297331A (ja
Inventor
Hiroshi Iwai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP61253219A priority Critical patent/JPS6297331A/ja
Publication of JPS6297331A publication Critical patent/JPS6297331A/ja
Publication of JPH0358531B2 publication Critical patent/JPH0358531B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Semiconductor Memories (AREA)
JP61253219A 1986-10-24 1986-10-24 半導体装置の製造方法 Granted JPS6297331A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61253219A JPS6297331A (ja) 1986-10-24 1986-10-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61253219A JPS6297331A (ja) 1986-10-24 1986-10-24 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55166930A Division JPS5790940A (en) 1980-11-27 1980-11-27 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS6297331A JPS6297331A (ja) 1987-05-06
JPH0358531B2 true JPH0358531B2 (de) 1991-09-05

Family

ID=17248215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61253219A Granted JPS6297331A (ja) 1986-10-24 1986-10-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6297331A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5074956A (en) * 1988-12-28 1991-12-24 Oki Electric Industry Co., Ltd. Pattern forming method
JP2537549Y2 (ja) * 1992-01-28 1997-06-04 本田技研工業株式会社 歯車研削装置のスライドカバー機構

Also Published As

Publication number Publication date
JPS6297331A (ja) 1987-05-06

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