JPH0357571B2 - - Google Patents

Info

Publication number
JPH0357571B2
JPH0357571B2 JP53061546A JP6154678A JPH0357571B2 JP H0357571 B2 JPH0357571 B2 JP H0357571B2 JP 53061546 A JP53061546 A JP 53061546A JP 6154678 A JP6154678 A JP 6154678A JP H0357571 B2 JPH0357571 B2 JP H0357571B2
Authority
JP
Japan
Prior art keywords
electron microscope
objective
lens system
lens
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53061546A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53147458A (en
Inventor
Baruto Re Hoore Yan
Deiideritsuku Uan Deru Masuto Kareru
Yohanesu Rakerusu Kurisuteiaan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of JPS53147458A publication Critical patent/JPS53147458A/ja
Publication of JPH0357571B2 publication Critical patent/JPH0357571B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP6154678A 1977-05-26 1978-05-23 Electron microscope Granted JPS53147458A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NLAANVRAGE7705789,A NL175245C (nl) 1977-05-26 1977-05-26 Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.

Publications (2)

Publication Number Publication Date
JPS53147458A JPS53147458A (en) 1978-12-22
JPH0357571B2 true JPH0357571B2 (enEXAMPLES) 1991-09-02

Family

ID=19828618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6154678A Granted JPS53147458A (en) 1977-05-26 1978-05-23 Electron microscope

Country Status (13)

Country Link
US (1) US4306149A (enEXAMPLES)
JP (1) JPS53147458A (enEXAMPLES)
AT (1) AT374303B (enEXAMPLES)
AU (1) AU518440B2 (enEXAMPLES)
BR (1) BR7803298A (enEXAMPLES)
CA (1) CA1110781A (enEXAMPLES)
DE (1) DE2822242A1 (enEXAMPLES)
ES (1) ES470151A1 (enEXAMPLES)
FR (1) FR2392493A1 (enEXAMPLES)
GB (1) GB1604898A (enEXAMPLES)
IT (1) IT1095832B (enEXAMPLES)
NL (1) NL175245C (enEXAMPLES)
SE (1) SE430281B (enEXAMPLES)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842935B2 (ja) * 1978-04-07 1983-09-22 日本電子株式会社 走査電子顕微鏡等の対物レンズ
US4585942A (en) * 1983-03-17 1986-04-29 Jeol Ltd. Transmission electron microscope
JPH0793119B2 (ja) * 1988-06-17 1995-10-09 日本電子株式会社 電子顕微鏡
DE3825103A1 (de) * 1988-07-23 1990-01-25 Zeiss Carl Fa Verfahren zum beleuchten eines objektes in einem transmissions-elektronenmikroskop
NL8803153A (nl) * 1988-12-23 1990-07-16 Philips Nv Elektronenbundel apparaat met dynamische focussering.
US5079428A (en) * 1989-08-31 1992-01-07 Bell Communications Research, Inc. Electron microscope with an asymmetrical immersion lens
EP0417354A1 (en) * 1989-09-15 1991-03-20 Koninklijke Philips Electronics N.V. Electron beam apparatus with charge-up compensation
JP2777840B2 (ja) * 1990-11-30 1998-07-23 セイコーインスツルメンツ株式会社 電子線装置
JP2651298B2 (ja) * 1991-10-29 1997-09-10 富士通株式会社 ビーム焦点調整器及び電子ビーム装置
JPH06215714A (ja) * 1992-06-05 1994-08-05 Hitachi Ltd 電界放出型透過電子顕微鏡
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
DE19945344A1 (de) * 1999-09-22 2001-03-29 Leo Elektronenmikroskopie Gmbh Teilchenoptisches Beleuchtungs- und Abbildungssystem mit einer Kondensor-Objektiv-Einfeldlinse
US7511280B2 (en) 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7601953B2 (en) 2006-03-20 2009-10-13 Alis Corporation Systems and methods for a gas field ion microscope
US7786452B2 (en) 2003-10-16 2010-08-31 Alis Corporation Ion sources, systems and methods
US7557361B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7368727B2 (en) 2003-10-16 2008-05-06 Alis Technology Corporation Atomic level ion source and method of manufacture and operation
US7786451B2 (en) 2003-10-16 2010-08-31 Alis Corporation Ion sources, systems and methods
US7321118B2 (en) 2005-06-07 2008-01-22 Alis Corporation Scanning transmission ion microscope
US7554096B2 (en) 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US8110814B2 (en) 2003-10-16 2012-02-07 Alis Corporation Ion sources, systems and methods
US7504639B2 (en) 2003-10-16 2009-03-17 Alis Corporation Ion sources, systems and methods
US9159527B2 (en) 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
US7557358B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7488952B2 (en) 2003-10-16 2009-02-10 Alis Corporation Ion sources, systems and methods
US7518122B2 (en) 2003-10-16 2009-04-14 Alis Corporation Ion sources, systems and methods
US7554097B2 (en) 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US7557360B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7511279B2 (en) 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7495232B2 (en) 2003-10-16 2009-02-24 Alis Corporation Ion sources, systems and methods
US7414243B2 (en) * 2005-06-07 2008-08-19 Alis Corporation Transmission ion microscope
US7485873B2 (en) 2003-10-16 2009-02-03 Alis Corporation Ion sources, systems and methods
US7521693B2 (en) 2003-10-16 2009-04-21 Alis Corporation Ion sources, systems and methods
US7557359B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
JP4919404B2 (ja) * 2006-06-15 2012-04-18 株式会社リコー 電子顕微鏡、電子線ホログラム作成方法及び位相再生画像作成方法
US7804068B2 (en) 2006-11-15 2010-09-28 Alis Corporation Determining dopant information
JP2014032835A (ja) * 2012-08-03 2014-02-20 Hitachi High-Technologies Corp 走査透過電子顕微鏡

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL145716B (nl) * 1964-06-06 1975-04-15 Philips Nv Elektronenstraalapparaat.
US3500269A (en) * 1966-06-10 1970-03-10 Hitachi Ltd Electron lens utilizing superconductive coils for an electron microscope or the like
DE1764442B1 (de) * 1968-06-06 1972-03-09 Hitachi Ltd Elektronenmikroskop
JPS4936496B1 (enEXAMPLES) * 1970-04-18 1974-10-01
US3748467A (en) * 1971-09-07 1973-07-24 Nibon Denshi K K Scanning electron microscope
JPS5126227B2 (enEXAMPLES) * 1971-09-21 1976-08-05
JPS5138578B2 (enEXAMPLES) * 1972-10-23 1976-10-22
US3872305A (en) * 1972-12-06 1975-03-18 Jeol Ltd Convertible scanning electron microscope

Also Published As

Publication number Publication date
FR2392493B1 (enEXAMPLES) 1983-06-17
AT374303B (de) 1984-04-10
NL175245B (nl) 1984-05-01
AU518440B2 (en) 1981-10-01
IT7823715A0 (it) 1978-05-23
US4306149A (en) 1981-12-15
NL7705789A (nl) 1978-11-28
DE2822242A1 (de) 1978-11-30
SE430281B (sv) 1983-10-31
NL175245C (nl) 1984-10-01
FR2392493A1 (fr) 1978-12-22
AU3654378A (en) 1979-11-29
ES470151A1 (es) 1979-09-16
ATA373778A (de) 1983-08-15
BR7803298A (pt) 1979-02-13
GB1604898A (en) 1981-12-16
JPS53147458A (en) 1978-12-22
CA1110781A (en) 1981-10-13
DE2822242C2 (enEXAMPLES) 1990-05-31
SE7805838L (sv) 1978-11-27
IT1095832B (it) 1985-08-17

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