JPH0356401B2 - - Google Patents
Info
- Publication number
- JPH0356401B2 JPH0356401B2 JP8364482A JP8364482A JPH0356401B2 JP H0356401 B2 JPH0356401 B2 JP H0356401B2 JP 8364482 A JP8364482 A JP 8364482A JP 8364482 A JP8364482 A JP 8364482A JP H0356401 B2 JPH0356401 B2 JP H0356401B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- level
- supplied
- sampling
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 31
- 238000005070 sampling Methods 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 16
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910000859 α-Fe Inorganic materials 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57083644A JPS58200104A (ja) | 1982-05-18 | 1982-05-18 | 光学式位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57083644A JPS58200104A (ja) | 1982-05-18 | 1982-05-18 | 光学式位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58200104A JPS58200104A (ja) | 1983-11-21 |
| JPH0356401B2 true JPH0356401B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-28 |
Family
ID=13808153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57083644A Granted JPS58200104A (ja) | 1982-05-18 | 1982-05-18 | 光学式位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58200104A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105807573B (zh) | 2014-12-31 | 2017-12-29 | 上海微电子装备（集团）股份有限公司 | 用于套刻误差检测的装置和方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5542962Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-03-17 | 1980-10-08 | ||
| JPS5339388U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1976-09-09 | 1978-04-06 |
-
1982
- 1982-05-18 JP JP57083644A patent/JPS58200104A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58200104A (ja) | 1983-11-21 |
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