JPS58200104A - 光学式位置検出装置 - Google Patents
光学式位置検出装置Info
- Publication number
- JPS58200104A JPS58200104A JP57083644A JP8364482A JPS58200104A JP S58200104 A JPS58200104 A JP S58200104A JP 57083644 A JP57083644 A JP 57083644A JP 8364482 A JP8364482 A JP 8364482A JP S58200104 A JPS58200104 A JP S58200104A
- Authority
- JP
- Japan
- Prior art keywords
- level
- circuit
- output
- measured
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 16
- 238000005070 sampling Methods 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims description 28
- 206010052804 Drug tolerance Diseases 0.000 claims 1
- 230000026781 habituation Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57083644A JPS58200104A (ja) | 1982-05-18 | 1982-05-18 | 光学式位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57083644A JPS58200104A (ja) | 1982-05-18 | 1982-05-18 | 光学式位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58200104A true JPS58200104A (ja) | 1983-11-21 |
| JPH0356401B2 JPH0356401B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-28 |
Family
ID=13808153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57083644A Granted JPS58200104A (ja) | 1982-05-18 | 1982-05-18 | 光学式位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58200104A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016107614A1 (zh) * | 2014-12-31 | 2016-07-07 | 上海微电子装备有限公司 | 用于套刻误差检测的装置和方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51116484U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-03-17 | 1976-09-21 | ||
| JPS5339388U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1976-09-09 | 1978-04-06 |
-
1982
- 1982-05-18 JP JP57083644A patent/JPS58200104A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51116484U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-03-17 | 1976-09-21 | ||
| JPS5339388U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1976-09-09 | 1978-04-06 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016107614A1 (zh) * | 2014-12-31 | 2016-07-07 | 上海微电子装备有限公司 | 用于套刻误差检测的装置和方法 |
| US10268125B2 (en) | 2014-12-31 | 2019-04-23 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Device and method for detecting overlay error |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356401B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-28 |