JPH0356043Y2 - - Google Patents
Info
- Publication number
- JPH0356043Y2 JPH0356043Y2 JP5526982U JP5526982U JPH0356043Y2 JP H0356043 Y2 JPH0356043 Y2 JP H0356043Y2 JP 5526982 U JP5526982 U JP 5526982U JP 5526982 U JP5526982 U JP 5526982U JP H0356043 Y2 JPH0356043 Y2 JP H0356043Y2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- epitaxial growth
- coil support
- frequency heating
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5526982U JPS58158439U (ja) | 1982-04-16 | 1982-04-16 | エピタキシヤル成長装置のコイル支え装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5526982U JPS58158439U (ja) | 1982-04-16 | 1982-04-16 | エピタキシヤル成長装置のコイル支え装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58158439U JPS58158439U (ja) | 1983-10-22 |
| JPH0356043Y2 true JPH0356043Y2 (ko) | 1991-12-16 |
Family
ID=30065855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5526982U Granted JPS58158439U (ja) | 1982-04-16 | 1982-04-16 | エピタキシヤル成長装置のコイル支え装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158439U (ko) |
-
1982
- 1982-04-16 JP JP5526982U patent/JPS58158439U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58158439U (ja) | 1983-10-22 |
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