JPH0354426B2 - - Google Patents
Info
- Publication number
- JPH0354426B2 JPH0354426B2 JP57108735A JP10873582A JPH0354426B2 JP H0354426 B2 JPH0354426 B2 JP H0354426B2 JP 57108735 A JP57108735 A JP 57108735A JP 10873582 A JP10873582 A JP 10873582A JP H0354426 B2 JPH0354426 B2 JP H0354426B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- coil
- current
- transistor
- coils
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005284 excitation Effects 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57108735A JPS58225551A (ja) | 1982-06-24 | 1982-06-24 | 磁界型電子レンズ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57108735A JPS58225551A (ja) | 1982-06-24 | 1982-06-24 | 磁界型電子レンズ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58225551A JPS58225551A (ja) | 1983-12-27 |
| JPH0354426B2 true JPH0354426B2 (enrdf_load_stackoverflow) | 1991-08-20 |
Family
ID=14492192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57108735A Granted JPS58225551A (ja) | 1982-06-24 | 1982-06-24 | 磁界型電子レンズ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58225551A (enrdf_load_stackoverflow) |
-
1982
- 1982-06-24 JP JP57108735A patent/JPS58225551A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58225551A (ja) | 1983-12-27 |
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