JPS6338825B2 - - Google Patents

Info

Publication number
JPS6338825B2
JPS6338825B2 JP56036635A JP3663581A JPS6338825B2 JP S6338825 B2 JPS6338825 B2 JP S6338825B2 JP 56036635 A JP56036635 A JP 56036635A JP 3663581 A JP3663581 A JP 3663581A JP S6338825 B2 JPS6338825 B2 JP S6338825B2
Authority
JP
Japan
Prior art keywords
coil
lens
excitation
magnetomotive force
coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56036635A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57151160A (en
Inventor
Akira Yonezawa
Tetsuo Iwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP56036635A priority Critical patent/JPS57151160A/ja
Publication of JPS57151160A publication Critical patent/JPS57151160A/ja
Publication of JPS6338825B2 publication Critical patent/JPS6338825B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56036635A 1981-03-16 1981-03-16 Electron lens Granted JPS57151160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56036635A JPS57151160A (en) 1981-03-16 1981-03-16 Electron lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56036635A JPS57151160A (en) 1981-03-16 1981-03-16 Electron lens

Publications (2)

Publication Number Publication Date
JPS57151160A JPS57151160A (en) 1982-09-18
JPS6338825B2 true JPS6338825B2 (enrdf_load_stackoverflow) 1988-08-02

Family

ID=12475292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56036635A Granted JPS57151160A (en) 1981-03-16 1981-03-16 Electron lens

Country Status (1)

Country Link
JP (1) JPS57151160A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5981850A (ja) * 1982-11-02 1984-05-11 Internatl Precision Inc 電子レンズ
JP2677316B2 (ja) * 1993-03-05 1997-11-17 株式会社トミー ゲーム装置
JP2013030276A (ja) * 2011-07-26 2013-02-07 Hitachi High-Technologies Corp 電磁レンズおよび荷電粒子装置
WO2018189850A1 (ja) * 2017-04-13 2018-10-18 株式会社 日立ハイテクノロジーズ 電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847265A (enrdf_load_stackoverflow) * 1971-10-15 1973-07-05
JPS5014439U (enrdf_load_stackoverflow) * 1973-06-04 1975-02-15

Also Published As

Publication number Publication date
JPS57151160A (en) 1982-09-18

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