JPH0234419B2 - - Google Patents

Info

Publication number
JPH0234419B2
JPH0234419B2 JP57191787A JP19178782A JPH0234419B2 JP H0234419 B2 JPH0234419 B2 JP H0234419B2 JP 57191787 A JP57191787 A JP 57191787A JP 19178782 A JP19178782 A JP 19178782A JP H0234419 B2 JPH0234419 B2 JP H0234419B2
Authority
JP
Japan
Prior art keywords
coil
magnetomotive force
lens
coils
excitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57191787A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5981850A (ja
Inventor
Akira Yonezawa
Tetsuo Iwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP57191787A priority Critical patent/JPS5981850A/ja
Publication of JPS5981850A publication Critical patent/JPS5981850A/ja
Publication of JPH0234419B2 publication Critical patent/JPH0234419B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57191787A 1982-11-02 1982-11-02 電子レンズ Granted JPS5981850A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57191787A JPS5981850A (ja) 1982-11-02 1982-11-02 電子レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57191787A JPS5981850A (ja) 1982-11-02 1982-11-02 電子レンズ

Publications (2)

Publication Number Publication Date
JPS5981850A JPS5981850A (ja) 1984-05-11
JPH0234419B2 true JPH0234419B2 (enrdf_load_stackoverflow) 1990-08-03

Family

ID=16280529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57191787A Granted JPS5981850A (ja) 1982-11-02 1982-11-02 電子レンズ

Country Status (1)

Country Link
JP (1) JPS5981850A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0687409B2 (ja) * 1985-10-28 1994-11-02 株式会社島津製作所 荷電粒子線を用いた分析装置の試料汚染防止方法
US4735288A (en) * 1986-01-24 1988-04-05 Ckd Kabushiki Kaisha Detachably attaching mechanism for cup of lubricator or filter used with air-actuated device
US5442182A (en) * 1992-11-06 1995-08-15 Hitachi, Ltd. Electron lens
US6429607B1 (en) 2000-08-15 2002-08-06 International Business Machines Corporation Constant power dynamic focus coil
US6852982B1 (en) * 2003-07-14 2005-02-08 Fei Company Magnetic lens
EP1501115B1 (en) * 2003-07-14 2009-07-01 FEI Company Dual beam system
JP4719628B2 (ja) * 2006-06-13 2011-07-06 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP5702552B2 (ja) 2009-05-28 2015-04-15 エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ デュアルビームシステムの制御方法
DE102017007479B4 (de) * 2017-08-08 2021-09-02 Comet Ag Objektiv und Kondensor für eine Röntgenröhre, Röntgenröhre und ein Verfahren zum Betrieb einer solchen Röntgenröhre
JP6954885B2 (ja) * 2018-11-26 2021-10-27 日本電子株式会社 荷電粒子線装置及び荷電粒子線装置の制御方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151160A (en) * 1981-03-16 1982-09-18 Internatl Precision Inc Electron lens

Also Published As

Publication number Publication date
JPS5981850A (ja) 1984-05-11

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