JPS58225551A - 磁界型電子レンズ - Google Patents

磁界型電子レンズ

Info

Publication number
JPS58225551A
JPS58225551A JP57108735A JP10873582A JPS58225551A JP S58225551 A JPS58225551 A JP S58225551A JP 57108735 A JP57108735 A JP 57108735A JP 10873582 A JP10873582 A JP 10873582A JP S58225551 A JPS58225551 A JP S58225551A
Authority
JP
Japan
Prior art keywords
lens
coil
magnetic field
field type
type electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57108735A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354426B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Arai
善博 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57108735A priority Critical patent/JPS58225551A/ja
Publication of JPS58225551A publication Critical patent/JPS58225551A/ja
Publication of JPH0354426B2 publication Critical patent/JPH0354426B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57108735A 1982-06-24 1982-06-24 磁界型電子レンズ Granted JPS58225551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57108735A JPS58225551A (ja) 1982-06-24 1982-06-24 磁界型電子レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57108735A JPS58225551A (ja) 1982-06-24 1982-06-24 磁界型電子レンズ

Publications (2)

Publication Number Publication Date
JPS58225551A true JPS58225551A (ja) 1983-12-27
JPH0354426B2 JPH0354426B2 (enrdf_load_stackoverflow) 1991-08-20

Family

ID=14492192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57108735A Granted JPS58225551A (ja) 1982-06-24 1982-06-24 磁界型電子レンズ

Country Status (1)

Country Link
JP (1) JPS58225551A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0354426B2 (enrdf_load_stackoverflow) 1991-08-20

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