JPH0354139Y2 - - Google Patents
Info
- Publication number
- JPH0354139Y2 JPH0354139Y2 JP4089687U JP4089687U JPH0354139Y2 JP H0354139 Y2 JPH0354139 Y2 JP H0354139Y2 JP 4089687 U JP4089687 U JP 4089687U JP 4089687 U JP4089687 U JP 4089687U JP H0354139 Y2 JPH0354139 Y2 JP H0354139Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- plate
- processing
- nozzle
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 65
- 239000007788 liquid Substances 0.000 claims description 43
- 238000004381 surface treatment Methods 0.000 claims description 10
- 238000005507 spraying Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 description 27
- 239000000463 material Substances 0.000 description 8
- 239000000428 dust Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089687U JPH0354139Y2 (enrdf_load_stackoverflow) | 1987-03-23 | 1987-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089687U JPH0354139Y2 (enrdf_load_stackoverflow) | 1987-03-23 | 1987-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63149966U JPS63149966U (enrdf_load_stackoverflow) | 1988-10-03 |
| JPH0354139Y2 true JPH0354139Y2 (enrdf_load_stackoverflow) | 1991-11-28 |
Family
ID=30855396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4089687U Expired JPH0354139Y2 (enrdf_load_stackoverflow) | 1987-03-23 | 1987-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354139Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6734655B2 (ja) * | 2016-01-29 | 2020-08-05 | 株式会社ケミトロン | エッチング装置 |
-
1987
- 1987-03-23 JP JP4089687U patent/JPH0354139Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63149966U (enrdf_load_stackoverflow) | 1988-10-03 |
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