JPH0353776B2 - - Google Patents

Info

Publication number
JPH0353776B2
JPH0353776B2 JP60229038A JP22903885A JPH0353776B2 JP H0353776 B2 JPH0353776 B2 JP H0353776B2 JP 60229038 A JP60229038 A JP 60229038A JP 22903885 A JP22903885 A JP 22903885A JP H0353776 B2 JPH0353776 B2 JP H0353776B2
Authority
JP
Japan
Prior art keywords
test
vacuum chamber
lsi
test head
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60229038A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6288332A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60229038A priority Critical patent/JPS6288332A/ja
Publication of JPS6288332A publication Critical patent/JPS6288332A/ja
Publication of JPH0353776B2 publication Critical patent/JPH0353776B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60229038A 1985-10-15 1985-10-15 試験装置 Granted JPS6288332A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60229038A JPS6288332A (ja) 1985-10-15 1985-10-15 試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60229038A JPS6288332A (ja) 1985-10-15 1985-10-15 試験装置

Publications (2)

Publication Number Publication Date
JPS6288332A JPS6288332A (ja) 1987-04-22
JPH0353776B2 true JPH0353776B2 (enrdf_load_stackoverflow) 1991-08-16

Family

ID=16885769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60229038A Granted JPS6288332A (ja) 1985-10-15 1985-10-15 試験装置

Country Status (1)

Country Link
JP (1) JPS6288332A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4513978B2 (ja) * 2005-10-25 2010-07-28 株式会社島津製作所 Ｔｆｔアレイ検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53159388U (enrdf_load_stackoverflow) * 1977-05-20 1978-12-13
JPS59163546A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 試料移動装置

Also Published As

Publication number Publication date
JPS6288332A (ja) 1987-04-22

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