JPH0353037Y2 - - Google Patents

Info

Publication number
JPH0353037Y2
JPH0353037Y2 JP1983119647U JP11964783U JPH0353037Y2 JP H0353037 Y2 JPH0353037 Y2 JP H0353037Y2 JP 1983119647 U JP1983119647 U JP 1983119647U JP 11964783 U JP11964783 U JP 11964783U JP H0353037 Y2 JPH0353037 Y2 JP H0353037Y2
Authority
JP
Japan
Prior art keywords
rotor
exhaust port
stator
diameter
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983119647U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6028297U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11964783U priority Critical patent/JPS6028297U/ja
Publication of JPS6028297U publication Critical patent/JPS6028297U/ja
Application granted granted Critical
Publication of JPH0353037Y2 publication Critical patent/JPH0353037Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP11964783U 1983-07-30 1983-07-30 タ−ボ分子ポンプ Granted JPS6028297U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11964783U JPS6028297U (ja) 1983-07-30 1983-07-30 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11964783U JPS6028297U (ja) 1983-07-30 1983-07-30 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6028297U JPS6028297U (ja) 1985-02-26
JPH0353037Y2 true JPH0353037Y2 (enrdf_load_stackoverflow) 1991-11-19

Family

ID=30274507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11964783U Granted JPS6028297U (ja) 1983-07-30 1983-07-30 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6028297U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065077B2 (ja) * 1985-04-30 1994-01-19 株式会社島津製作所 ターボ分子ポンプ
JPH0429836Y2 (enrdf_load_stackoverflow) * 1987-10-15 1992-07-20
JP7424007B2 (ja) * 2019-11-26 2024-01-30 株式会社島津製作所 真空ポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe

Also Published As

Publication number Publication date
JPS6028297U (ja) 1985-02-26

Similar Documents

Publication Publication Date Title
US4373861A (en) Axial-flow fan
US5011367A (en) Fuel pump
EP0568069B1 (en) Turbomolecular vacuum pumps
JP3995419B2 (ja) デュアルインレット真空ポンプ
US6540480B2 (en) Compressor
JP4173637B2 (ja) ステータとロータを備えた摩擦真空ポンプ
JP4520636B2 (ja) シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
JP6331491B2 (ja) 真空ポンプ
TW201118256A (en) Vacuum pump
JPH0826877B2 (ja) ターボ分子ポンプ
JPH0353037Y2 (enrdf_load_stackoverflow)
JPH05288195A (ja) 電動送風機
US20210102551A1 (en) Electric compressor
JP4050811B2 (ja) 複流形気体摩擦ポンプ
CN104747465B (zh) 真空泵
JP2024086911A (ja) インペラ、及び遠心圧縮機
WO2008027388B1 (en) Vacuum pumps with improved pumping channel cross sections
JP6745331B2 (ja) 回転機械、ターボチャージャ
JPH02264196A (ja) ターボ真空ポンプ
JPH0617035Y2 (ja) タ−ボ分子ポンプ
JP3045418B2 (ja) ターボ真空ポンプ
JPH03237297A (ja) ターボ分子ポンプ
JPH0216394A (ja) ターボ分子ポンプ
JPS63223394A (ja) タ−ボ真空ポンプ
JPS58197497A (ja) タ−ボ分子ポンプ