JPH0348852U - - Google Patents

Info

Publication number
JPH0348852U
JPH0348852U JP10902789U JP10902789U JPH0348852U JP H0348852 U JPH0348852 U JP H0348852U JP 10902789 U JP10902789 U JP 10902789U JP 10902789 U JP10902789 U JP 10902789U JP H0348852 U JPH0348852 U JP H0348852U
Authority
JP
Japan
Prior art keywords
detection device
backscattered electron
utility
scope
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10902789U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10902789U priority Critical patent/JPH0348852U/ja
Publication of JPH0348852U publication Critical patent/JPH0348852U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本案の一実施例を示す断面図、第２図
は本案の反射電子検出素子取り付けの詳細断面図
、第３図は本案の一実施例を示す信号系統図であ
る。 １……電子ビーム、２…対物レンズ、３……試
料、５……反射電子信号、６……特性Ｘ線、７…
…Ｘ線取り出し孔、８……反射電子検出素子、９
……光フアイバー、１１……光電子増倍管、１２
……プリアンプ。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ 試料から発生する反射電子信号を検出し、像
    観察する走査形電子顕微鏡の反射電子検出装置に
    おいて、対物レンズ下部磁極の特性Ｘ線取り出し
    孔に装備できる構造を有することを特徴とする反
    射電子検出装置。 ２ 実用新案登録請求の範囲第１項において、前
    記反射電子検出器は複数個を設けることを特徴と
    する反射電子検出装置。
JP10902789U 1989-09-20 1989-09-20 Pending JPH0348852U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10902789U JPH0348852U (ja) 1989-09-20 1989-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10902789U JPH0348852U (ja) 1989-09-20 1989-09-20

Publications (1)

Publication Number Publication Date
JPH0348852U true JPH0348852U (ja) 1991-05-10

Family

ID=31657631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10902789U Pending JPH0348852U (ja) 1989-09-20 1989-09-20

Country Status (1)

Country Link
JP (1) JPH0348852U (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212233A (ja) * 2009-02-10 2010-09-24 Univ Of Tokyo 透過型電子顕微鏡
WO2013077217A1 (ja) * 2011-11-25 2013-05-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2014229551A (ja) * 2013-05-24 2014-12-08 Toto株式会社 反射電子検出器
US9153417B2 (en) 2011-11-25 2015-10-06 Totoltd. Back scattered electron detector

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212233A (ja) * 2009-02-10 2010-09-24 Univ Of Tokyo 透過型電子顕微鏡
WO2013077217A1 (ja) * 2011-11-25 2013-05-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2013114763A (ja) * 2011-11-25 2013-06-10 Hitachi High-Technologies Corp 荷電粒子線装置
US9053902B2 (en) 2011-11-25 2015-06-09 Hitachi High-Technologies Corporation Charged-particle radiation apparatus
US9153417B2 (en) 2011-11-25 2015-10-06 Totoltd. Back scattered electron detector
JP2014229551A (ja) * 2013-05-24 2014-12-08 Toto株式会社 反射電子検出器

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