JPH034868Y2 - - Google Patents

Info

Publication number
JPH034868Y2
JPH034868Y2 JP15473285U JP15473285U JPH034868Y2 JP H034868 Y2 JPH034868 Y2 JP H034868Y2 JP 15473285 U JP15473285 U JP 15473285U JP 15473285 U JP15473285 U JP 15473285U JP H034868 Y2 JPH034868 Y2 JP H034868Y2
Authority
JP
Japan
Prior art keywords
diaphragm
valve
pilot valve
inlet
back chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15473285U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262077U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15473285U priority Critical patent/JPH034868Y2/ja
Publication of JPS6262077U publication Critical patent/JPS6262077U/ja
Application granted granted Critical
Publication of JPH034868Y2 publication Critical patent/JPH034868Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP15473285U 1985-10-09 1985-10-09 Expired JPH034868Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15473285U JPH034868Y2 (zh) 1985-10-09 1985-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15473285U JPH034868Y2 (zh) 1985-10-09 1985-10-09

Publications (2)

Publication Number Publication Date
JPS6262077U JPS6262077U (zh) 1987-04-17
JPH034868Y2 true JPH034868Y2 (zh) 1991-02-07

Family

ID=31074797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15473285U Expired JPH034868Y2 (zh) 1985-10-09 1985-10-09

Country Status (1)

Country Link
JP (1) JPH034868Y2 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004030976A1 (de) * 2004-06-26 2006-01-19 Robert Bosch Gmbh Taktventil
JP2009275747A (ja) * 2008-05-13 2009-11-26 Nippon Spindle Mfg Co Ltd ダイヤフラムバルブ及び集塵機
JP5105451B2 (ja) * 2010-09-10 2012-12-26 日本スピンドル製造株式会社 ダイヤフラムバルブ
DE112018004511T5 (de) * 2017-10-13 2020-06-10 Smc Corporation Druckfluidabgabesteuervorrichtung
KR102508110B1 (ko) 2018-09-12 2023-03-09 에스엠시 가부시키가이샤 압축유체 토출 제어장치

Also Published As

Publication number Publication date
JPS6262077U (zh) 1987-04-17

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