JPH0343742B2 - - Google Patents
Info
- Publication number
- JPH0343742B2 JPH0343742B2 JP58021244A JP2124483A JPH0343742B2 JP H0343742 B2 JPH0343742 B2 JP H0343742B2 JP 58021244 A JP58021244 A JP 58021244A JP 2124483 A JP2124483 A JP 2124483A JP H0343742 B2 JPH0343742 B2 JP H0343742B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- mark
- magnification
- signal
- bright spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58021244A JPS59148254A (ja) | 1983-02-10 | 1983-02-10 | 走査電子顕微鏡等の試料移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58021244A JPS59148254A (ja) | 1983-02-10 | 1983-02-10 | 走査電子顕微鏡等の試料移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59148254A JPS59148254A (ja) | 1984-08-24 |
| JPH0343742B2 true JPH0343742B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-03 |
Family
ID=12049638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58021244A Granted JPS59148254A (ja) | 1983-02-10 | 1983-02-10 | 走査電子顕微鏡等の試料移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59148254A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6151658U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1984-09-06 | 1986-04-07 | ||
| JPS6177334A (ja) * | 1984-09-21 | 1986-04-19 | Fujitsu Ltd | 電子ビ−ム装置 |
| JPS6258852U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1985-09-30 | 1987-04-11 | ||
| JPS6410559A (en) * | 1987-07-02 | 1989-01-13 | Nikon Corp | Sample image pattern measuring device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5243355A (en) * | 1975-10-01 | 1977-04-05 | Jeol Ltd | Test data transfer device for electric particle line eqipment |
| JPS5478075A (en) * | 1977-12-05 | 1979-06-21 | Hitachi Ltd | Sample image display device |
| JPS5824901B2 (ja) * | 1978-02-20 | 1983-05-24 | 日本電子株式会社 | 走査電子顕微鏡 |
-
1983
- 1983-02-10 JP JP58021244A patent/JPS59148254A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59148254A (ja) | 1984-08-24 |