JPH0223972B2 - - Google Patents
Info
- Publication number
- JPH0223972B2 JPH0223972B2 JP57053561A JP5356182A JPH0223972B2 JP H0223972 B2 JPH0223972 B2 JP H0223972B2 JP 57053561 A JP57053561 A JP 57053561A JP 5356182 A JP5356182 A JP 5356182A JP H0223972 B2 JPH0223972 B2 JP H0223972B2
- Authority
- JP
- Japan
- Prior art keywords
- screen
- sample
- scanning
- center
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57053561A JPS58169763A (ja) | 1982-03-30 | 1982-03-30 | 定移動ズ−ム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57053561A JPS58169763A (ja) | 1982-03-30 | 1982-03-30 | 定移動ズ−ム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58169763A JPS58169763A (ja) | 1983-10-06 |
| JPH0223972B2 true JPH0223972B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-28 |
Family
ID=12946221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57053561A Granted JPS58169763A (ja) | 1982-03-30 | 1982-03-30 | 定移動ズ−ム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58169763A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100730797B1 (ko) * | 2006-02-03 | 2007-06-20 | 고영창 | 아파트 세대별 층간 외벽용 방화장치 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60238996A (ja) * | 1984-05-11 | 1985-11-27 | 株式会社アポロメック | 回数券式磁気カ−ドおよびその使用装置 |
-
1982
- 1982-03-30 JP JP57053561A patent/JPS58169763A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100730797B1 (ko) * | 2006-02-03 | 2007-06-20 | 고영창 | 아파트 세대별 층간 외벽용 방화장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58169763A (ja) | 1983-10-06 |