JPH0342682B2 - - Google Patents
Info
- Publication number
- JPH0342682B2 JPH0342682B2 JP60116910A JP11691085A JPH0342682B2 JP H0342682 B2 JPH0342682 B2 JP H0342682B2 JP 60116910 A JP60116910 A JP 60116910A JP 11691085 A JP11691085 A JP 11691085A JP H0342682 B2 JPH0342682 B2 JP H0342682B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- electrode
- film
- sic
- resistor film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 32
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 19
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 18
- 230000005496 eutectics Effects 0.000 claims description 6
- 229910000679 solder Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 239000011888 foil Substances 0.000 description 11
- 239000011521 glass Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60116910A JPS61276202A (ja) | 1985-05-30 | 1985-05-30 | 薄膜サ−ミスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60116910A JPS61276202A (ja) | 1985-05-30 | 1985-05-30 | 薄膜サ−ミスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61276202A JPS61276202A (ja) | 1986-12-06 |
| JPH0342682B2 true JPH0342682B2 (enrdf_load_stackoverflow) | 1991-06-28 |
Family
ID=14698670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60116910A Granted JPS61276202A (ja) | 1985-05-30 | 1985-05-30 | 薄膜サ−ミスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61276202A (enrdf_load_stackoverflow) |
-
1985
- 1985-05-30 JP JP60116910A patent/JPS61276202A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61276202A (ja) | 1986-12-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6660554B2 (en) | Thermistor and method of manufacture | |
| GB2148676A (en) | Ceramic heater having temperature sensor integrally formed thereon | |
| JPS6143402A (ja) | サーミスタの製造方法 | |
| US4596975A (en) | Thermally insulative mounting with solid state device | |
| JPH0810645B2 (ja) | 薄膜サーミスタ | |
| JPH1140403A (ja) | 温度センサ素子 | |
| JPH0342682B2 (enrdf_load_stackoverflow) | ||
| JPH0657622B2 (ja) | ろう付けペースト | |
| JPH10208906A (ja) | 温度センサ | |
| JPS6236603B2 (enrdf_load_stackoverflow) | ||
| JPH02244531A (ja) | 基板型温度ヒューズ・抵抗体及びその製造方法 | |
| JPH0287030A (ja) | 白金温度センサ | |
| JPS622683B2 (enrdf_load_stackoverflow) | ||
| JPS6345760Y2 (enrdf_load_stackoverflow) | ||
| JPH02244530A (ja) | 基板型温度ヒューズ及びその製造方法 | |
| JPH02265207A (ja) | チップ抵抗器 | |
| JPS62202502A (ja) | 薄膜サ−ミスタ | |
| JPH03250601A (ja) | 負特性サーミスタ素子 | |
| JPH0115125Y2 (enrdf_load_stackoverflow) | ||
| JPS6155055B2 (enrdf_load_stackoverflow) | ||
| JPS62111402A (ja) | 薄膜サ−ミスタ | |
| JPS6333282B2 (enrdf_load_stackoverflow) | ||
| JPH0553042B2 (enrdf_load_stackoverflow) | ||
| JPS58201202A (ja) | 半導体磁器用導電性ペースト | |
| JPH0638363B2 (ja) | 薄膜サ−ミスタ |