JPS61276202A - 薄膜サ−ミスタ - Google Patents

薄膜サ−ミスタ

Info

Publication number
JPS61276202A
JPS61276202A JP60116910A JP11691085A JPS61276202A JP S61276202 A JPS61276202 A JP S61276202A JP 60116910 A JP60116910 A JP 60116910A JP 11691085 A JP11691085 A JP 11691085A JP S61276202 A JPS61276202 A JP S61276202A
Authority
JP
Japan
Prior art keywords
thin film
electrode
film
film thermistor
thermistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60116910A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342682B2 (enrdf_load_stackoverflow
Inventor
彪 長井
祐 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60116910A priority Critical patent/JPS61276202A/ja
Publication of JPS61276202A publication Critical patent/JPS61276202A/ja
Publication of JPH0342682B2 publication Critical patent/JPH0342682B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP60116910A 1985-05-30 1985-05-30 薄膜サ−ミスタ Granted JPS61276202A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60116910A JPS61276202A (ja) 1985-05-30 1985-05-30 薄膜サ−ミスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60116910A JPS61276202A (ja) 1985-05-30 1985-05-30 薄膜サ−ミスタ

Publications (2)

Publication Number Publication Date
JPS61276202A true JPS61276202A (ja) 1986-12-06
JPH0342682B2 JPH0342682B2 (enrdf_load_stackoverflow) 1991-06-28

Family

ID=14698670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60116910A Granted JPS61276202A (ja) 1985-05-30 1985-05-30 薄膜サ−ミスタ

Country Status (1)

Country Link
JP (1) JPS61276202A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0342682B2 (enrdf_load_stackoverflow) 1991-06-28

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