JPS61276202A - 薄膜サ−ミスタ - Google Patents
薄膜サ−ミスタInfo
- Publication number
- JPS61276202A JPS61276202A JP60116910A JP11691085A JPS61276202A JP S61276202 A JPS61276202 A JP S61276202A JP 60116910 A JP60116910 A JP 60116910A JP 11691085 A JP11691085 A JP 11691085A JP S61276202 A JPS61276202 A JP S61276202A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- electrode
- film
- film thermistor
- thermistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 20
- 239000010408 film Substances 0.000 claims description 32
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 17
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 239000011888 foil Substances 0.000 description 11
- 230000005496 eutectics Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 241001494479 Pecora Species 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60116910A JPS61276202A (ja) | 1985-05-30 | 1985-05-30 | 薄膜サ−ミスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60116910A JPS61276202A (ja) | 1985-05-30 | 1985-05-30 | 薄膜サ−ミスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61276202A true JPS61276202A (ja) | 1986-12-06 |
| JPH0342682B2 JPH0342682B2 (enrdf_load_stackoverflow) | 1991-06-28 |
Family
ID=14698670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60116910A Granted JPS61276202A (ja) | 1985-05-30 | 1985-05-30 | 薄膜サ−ミスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61276202A (enrdf_load_stackoverflow) |
-
1985
- 1985-05-30 JP JP60116910A patent/JPS61276202A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342682B2 (enrdf_load_stackoverflow) | 1991-06-28 |
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