JPH0341987B2 - - Google Patents

Info

Publication number
JPH0341987B2
JPH0341987B2 JP60057717A JP5771785A JPH0341987B2 JP H0341987 B2 JPH0341987 B2 JP H0341987B2 JP 60057717 A JP60057717 A JP 60057717A JP 5771785 A JP5771785 A JP 5771785A JP H0341987 B2 JPH0341987 B2 JP H0341987B2
Authority
JP
Japan
Prior art keywords
silicon layer
crystal silicon
single crystal
polycrystalline silicon
floating gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60057717A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61216480A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60057717A priority Critical patent/JPS61216480A/ja
Publication of JPS61216480A publication Critical patent/JPS61216480A/ja
Publication of JPH0341987B2 publication Critical patent/JPH0341987B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP60057717A 1985-03-22 1985-03-22 不揮発性半導体記憶装置の製造方法 Granted JPS61216480A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60057717A JPS61216480A (ja) 1985-03-22 1985-03-22 不揮発性半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60057717A JPS61216480A (ja) 1985-03-22 1985-03-22 不揮発性半導体記憶装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61216480A JPS61216480A (ja) 1986-09-26
JPH0341987B2 true JPH0341987B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-25

Family

ID=13063694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60057717A Granted JPS61216480A (ja) 1985-03-22 1985-03-22 不揮発性半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61216480A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4597060A (en) * 1985-05-01 1986-06-24 Texas Instruments Incorporated EPROM array and method for fabricating

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961189A (ja) * 1982-09-15 1984-04-07 ナシヨナル・セミコンダクタ−・コ−ポレ−シヨン 高密度型ｅｐｒｏｍメモリ−・アレ−

Also Published As

Publication number Publication date
JPS61216480A (ja) 1986-09-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term