JPH0341471Y2 - - Google Patents
Info
- Publication number
- JPH0341471Y2 JPH0341471Y2 JP19780586U JP19780586U JPH0341471Y2 JP H0341471 Y2 JPH0341471 Y2 JP H0341471Y2 JP 19780586 U JP19780586 U JP 19780586U JP 19780586 U JP19780586 U JP 19780586U JP H0341471 Y2 JPH0341471 Y2 JP H0341471Y2
- Authority
- JP
- Japan
- Prior art keywords
- hangar
- movable shelf
- main body
- loading
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 29
- 238000003860 storage Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19780586U JPH0341471Y2 (zh) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19780586U JPH0341471Y2 (zh) | 1986-12-23 | 1986-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63102239U JPS63102239U (zh) | 1988-07-02 |
| JPH0341471Y2 true JPH0341471Y2 (zh) | 1991-08-30 |
Family
ID=31157905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19780586U Expired JPH0341471Y2 (zh) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341471Y2 (zh) |
-
1986
- 1986-12-23 JP JP19780586U patent/JPH0341471Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63102239U (zh) | 1988-07-02 |
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