JPH0341469Y2 - - Google Patents
Info
- Publication number
- JPH0341469Y2 JPH0341469Y2 JP17544086U JP17544086U JPH0341469Y2 JP H0341469 Y2 JPH0341469 Y2 JP H0341469Y2 JP 17544086 U JP17544086 U JP 17544086U JP 17544086 U JP17544086 U JP 17544086U JP H0341469 Y2 JPH0341469 Y2 JP H0341469Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- wafer
- heads
- semiconductor
- nozzles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 48
- 239000013307 optical fiber Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17544086U JPH0341469Y2 (me) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17544086U JPH0341469Y2 (me) | 1986-11-14 | 1986-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6380846U JPS6380846U (me) | 1988-05-27 |
| JPH0341469Y2 true JPH0341469Y2 (me) | 1991-08-30 |
Family
ID=31114764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17544086U Expired JPH0341469Y2 (me) | 1986-11-14 | 1986-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341469Y2 (me) |
-
1986
- 1986-11-14 JP JP17544086U patent/JPH0341469Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6380846U (me) | 1988-05-27 |
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