JPH0340959B2 - - Google Patents

Info

Publication number
JPH0340959B2
JPH0340959B2 JP59237963A JP23796384A JPH0340959B2 JP H0340959 B2 JPH0340959 B2 JP H0340959B2 JP 59237963 A JP59237963 A JP 59237963A JP 23796384 A JP23796384 A JP 23796384A JP H0340959 B2 JPH0340959 B2 JP H0340959B2
Authority
JP
Japan
Prior art keywords
substrate
impurity concentration
etching
layer
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59237963A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61116879A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59237963A priority Critical patent/JPS61116879A/ja
Publication of JPS61116879A publication Critical patent/JPS61116879A/ja
Publication of JPH0340959B2 publication Critical patent/JPH0340959B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
  • Measuring Fluid Pressure (AREA)
JP59237963A 1984-11-12 1984-11-12 半導体圧力変換素子起わい部の形成方法 Granted JPS61116879A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59237963A JPS61116879A (ja) 1984-11-12 1984-11-12 半導体圧力変換素子起わい部の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59237963A JPS61116879A (ja) 1984-11-12 1984-11-12 半導体圧力変換素子起わい部の形成方法

Publications (2)

Publication Number Publication Date
JPS61116879A JPS61116879A (ja) 1986-06-04
JPH0340959B2 true JPH0340959B2 (enrdf_load_stackoverflow) 1991-06-20

Family

ID=17023057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59237963A Granted JPS61116879A (ja) 1984-11-12 1984-11-12 半導体圧力変換素子起わい部の形成方法

Country Status (1)

Country Link
JP (1) JPS61116879A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009116286A1 (ja) 2008-03-18 2009-09-24 国立大学法人山口大学 凝集性酵母、及びその作製法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2514210B2 (ja) * 1987-07-23 1996-07-10 日産自動車株式会社 半導体基板のエッチング方法
US5352048A (en) * 1988-12-23 1994-10-04 Canon Kabushiki Kaisha Ink sheet cassette and recording apparatus capable of loading the ink sheet cassette

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009116286A1 (ja) 2008-03-18 2009-09-24 国立大学法人山口大学 凝集性酵母、及びその作製法

Also Published As

Publication number Publication date
JPS61116879A (ja) 1986-06-04

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