JPH0340464A - 光電変換装置 - Google Patents
光電変換装置Info
- Publication number
- JPH0340464A JPH0340464A JP2172601A JP17260190A JPH0340464A JP H0340464 A JPH0340464 A JP H0340464A JP 2172601 A JP2172601 A JP 2172601A JP 17260190 A JP17260190 A JP 17260190A JP H0340464 A JPH0340464 A JP H0340464A
- Authority
- JP
- Japan
- Prior art keywords
- region
- potential
- voltage
- base
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 title claims description 58
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 238000007667 floating Methods 0.000 claims abstract description 25
- 239000000969 carrier Substances 0.000 claims abstract description 22
- 239000004065 semiconductor Substances 0.000 claims description 42
- 239000004020 conductor Substances 0.000 claims description 15
- 230000001443 photoexcitation Effects 0.000 claims description 2
- 239000012535 impurity Substances 0.000 abstract description 49
- 238000000034 method Methods 0.000 abstract description 45
- 238000003860 storage Methods 0.000 abstract description 24
- 238000009792 diffusion process Methods 0.000 abstract description 18
- 230000002441 reversible effect Effects 0.000 abstract description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 14
- 229910052681 coesite Inorganic materials 0.000 abstract description 5
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 5
- 239000000377 silicon dioxide Substances 0.000 abstract description 5
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 5
- 229910052682 stishovite Inorganic materials 0.000 abstract description 5
- 229910052905 tridymite Inorganic materials 0.000 abstract description 5
- 238000009413 insulation Methods 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 description 52
- 239000010410 layer Substances 0.000 description 40
- 238000003384 imaging method Methods 0.000 description 35
- 239000007789 gas Substances 0.000 description 27
- 238000009825 accumulation Methods 0.000 description 22
- 239000003990 capacitor Substances 0.000 description 22
- 230000007423 decrease Effects 0.000 description 22
- 238000010586 diagram Methods 0.000 description 19
- 238000002955 isolation Methods 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 14
- 229910021417 amorphous silicon Inorganic materials 0.000 description 13
- 230000003321 amplification Effects 0.000 description 12
- 230000008859 change Effects 0.000 description 12
- 239000013078 crystal Substances 0.000 description 12
- 238000003199 nucleic acid amplification method Methods 0.000 description 12
- 229910052698 phosphorus Inorganic materials 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 12
- 229920005591 polysilicon Polymers 0.000 description 12
- 238000005229 chemical vapour deposition Methods 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 9
- 238000012546 transfer Methods 0.000 description 9
- 229910052785 arsenic Inorganic materials 0.000 description 8
- 230000008901 benefit Effects 0.000 description 8
- 230000005684 electric field Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 7
- 206010047571 Visual impairment Diseases 0.000 description 7
- 229910052796 boron Inorganic materials 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 239000007790 solid phase Substances 0.000 description 6
- 230000001052 transient effect Effects 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 101100114490 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) cox-13 gene Proteins 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000001066 destructive effect Effects 0.000 description 3
- 229910001385 heavy metal Inorganic materials 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000013081 microcrystal Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 101150047623 BRINP1 gene Proteins 0.000 description 1
- 102100040550 FXYD domain-containing ion transport regulator 4 Human genes 0.000 description 1
- 229910003251 Na K Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 108010070092 corticosteroid hormone-induced factor Proteins 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- -1 sin Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2172601A JPH0340464A (ja) | 1990-07-02 | 1990-07-02 | 光電変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2172601A JPH0340464A (ja) | 1990-07-02 | 1990-07-02 | 光電変換装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58120751A Division JPS6012759A (ja) | 1983-07-02 | 1983-07-02 | 光電変換装置及びその光電変換方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0340464A true JPH0340464A (ja) | 1991-02-21 |
| JPH0449263B2 JPH0449263B2 (fr) | 1992-08-11 |
Family
ID=15944883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2172601A Granted JPH0340464A (ja) | 1990-07-02 | 1990-07-02 | 光電変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0340464A (fr) |
-
1990
- 1990-07-02 JP JP2172601A patent/JPH0340464A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449263B2 (fr) | 1992-08-11 |
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