JPH034028Y2 - - Google Patents

Info

Publication number
JPH034028Y2
JPH034028Y2 JP1987150233U JP15023387U JPH034028Y2 JP H034028 Y2 JPH034028 Y2 JP H034028Y2 JP 1987150233 U JP1987150233 U JP 1987150233U JP 15023387 U JP15023387 U JP 15023387U JP H034028 Y2 JPH034028 Y2 JP H034028Y2
Authority
JP
Japan
Prior art keywords
crystal
substrate
quartz tube
heat sink
internal heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987150233U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6457637U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150233U priority Critical patent/JPH034028Y2/ja
Publication of JPS6457637U publication Critical patent/JPS6457637U/ja
Application granted granted Critical
Publication of JPH034028Y2 publication Critical patent/JPH034028Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1987150233U 1987-09-30 1987-09-30 Expired JPH034028Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150233U JPH034028Y2 (enExample) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150233U JPH034028Y2 (enExample) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6457637U JPS6457637U (enExample) 1989-04-10
JPH034028Y2 true JPH034028Y2 (enExample) 1991-02-01

Family

ID=31423190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150233U Expired JPH034028Y2 (enExample) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH034028Y2 (enExample)

Also Published As

Publication number Publication date
JPS6457637U (enExample) 1989-04-10

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