JPH033899B2 - - Google Patents

Info

Publication number
JPH033899B2
JPH033899B2 JP8773482A JP8773482A JPH033899B2 JP H033899 B2 JPH033899 B2 JP H033899B2 JP 8773482 A JP8773482 A JP 8773482A JP 8773482 A JP8773482 A JP 8773482A JP H033899 B2 JPH033899 B2 JP H033899B2
Authority
JP
Japan
Prior art keywords
patterns
optical
optical path
path changing
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8773482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58204345A (ja
Inventor
Yasushi Uchama
Daikichi Awamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
REEZAA TETSUKU KK
Original Assignee
REEZAA TETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by REEZAA TETSUKU KK filed Critical REEZAA TETSUKU KK
Priority to JP57087734A priority Critical patent/JPS58204345A/ja
Publication of JPS58204345A publication Critical patent/JPS58204345A/ja
Publication of JPH033899B2 publication Critical patent/JPH033899B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57087734A 1982-05-24 1982-05-24 パタ−ンの欠陥検査装置 Granted JPS58204345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57087734A JPS58204345A (ja) 1982-05-24 1982-05-24 パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57087734A JPS58204345A (ja) 1982-05-24 1982-05-24 パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS58204345A JPS58204345A (ja) 1983-11-29
JPH033899B2 true JPH033899B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-21

Family

ID=13923147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57087734A Granted JPS58204345A (ja) 1982-05-24 1982-05-24 パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS58204345A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935044A (ja) * 1982-08-18 1984-02-25 Shin Etsu Chem Co Ltd 光通信フアイバ−用被覆剤

Also Published As

Publication number Publication date
JPS58204345A (ja) 1983-11-29

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