JPH033615B2 - - Google Patents
Info
- Publication number
- JPH033615B2 JPH033615B2 JP2753086A JP2753086A JPH033615B2 JP H033615 B2 JPH033615 B2 JP H033615B2 JP 2753086 A JP2753086 A JP 2753086A JP 2753086 A JP2753086 A JP 2753086A JP H033615 B2 JPH033615 B2 JP H033615B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction vessel
- gas pressure
- manufacturing apparatus
- glass manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 101
- 238000006243 chemical reaction Methods 0.000 claims description 75
- 239000011521 glass Substances 0.000 claims description 46
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 230000003749 cleanliness Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 3
- 239000010419 fine particle Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229920002050 silicone resin Polymers 0.000 claims description 2
- 239000005373 porous glass Substances 0.000 description 12
- 239000002912 waste gas Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- -1 SiCl 4 Chemical class 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0144—Means for after-treatment or catching of worked reactant gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2753086A JPS62187121A (ja) | 1986-02-10 | 1986-02-10 | 合成ガラス製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2753086A JPS62187121A (ja) | 1986-02-10 | 1986-02-10 | 合成ガラス製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62187121A JPS62187121A (ja) | 1987-08-15 |
| JPH033615B2 true JPH033615B2 (enrdf_load_stackoverflow) | 1991-01-21 |
Family
ID=12223667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2753086A Granted JPS62187121A (ja) | 1986-02-10 | 1986-02-10 | 合成ガラス製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62187121A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2557651B2 (ja) * | 1987-07-02 | 1996-11-27 | 株式会社フジクラ | 光フアイバ母材の製造方法 |
| JP2604454B2 (ja) * | 1988-12-23 | 1997-04-30 | 信越化学工業株式会社 | シングルモード型光ファイバープリフォームの製造方法 |
| JPH02243521A (ja) * | 1989-03-16 | 1990-09-27 | Nippon Telegr & Teleph Corp <Ntt> | フッ化物ガラスロッドレンズ並びにその製造方法及び装置 |
| JP5050969B2 (ja) * | 1998-08-24 | 2012-10-17 | 旭硝子株式会社 | 合成石英ガラス光学部材とその製造方法 |
| JP5678711B2 (ja) * | 2011-02-16 | 2015-03-04 | 住友電気工業株式会社 | ガラス微粒子堆積体の製造方法 |
-
1986
- 1986-02-10 JP JP2753086A patent/JPS62187121A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62187121A (ja) | 1987-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |