JPH0334576B2 - - Google Patents

Info

Publication number
JPH0334576B2
JPH0334576B2 JP58026155A JP2615583A JPH0334576B2 JP H0334576 B2 JPH0334576 B2 JP H0334576B2 JP 58026155 A JP58026155 A JP 58026155A JP 2615583 A JP2615583 A JP 2615583A JP H0334576 B2 JPH0334576 B2 JP H0334576B2
Authority
JP
Japan
Prior art keywords
substrate
foreign object
light
detection
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58026155A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59152625A (ja
Inventor
Yukio Uto
Mitsuyoshi Koizumi
Masataka Shiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58026155A priority Critical patent/JPS59152625A/ja
Publication of JPS59152625A publication Critical patent/JPS59152625A/ja
Publication of JPH0334576B2 publication Critical patent/JPH0334576B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58026155A 1983-02-21 1983-02-21 異物検出装置 Granted JPS59152625A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58026155A JPS59152625A (ja) 1983-02-21 1983-02-21 異物検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58026155A JPS59152625A (ja) 1983-02-21 1983-02-21 異物検出装置

Publications (2)

Publication Number Publication Date
JPS59152625A JPS59152625A (ja) 1984-08-31
JPH0334576B2 true JPH0334576B2 (OSRAM) 1991-05-23

Family

ID=12185642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58026155A Granted JPS59152625A (ja) 1983-02-21 1983-02-21 異物検出装置

Country Status (1)

Country Link
JP (1) JPS59152625A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3087384B2 (ja) * 1991-10-08 2000-09-11 松下電器産業株式会社 異物検査装置
JP6119785B2 (ja) * 2015-03-17 2017-04-26 大日本印刷株式会社 異物検査装置、異物検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671173A (en) * 1979-11-14 1981-06-13 Hitachi Ltd Pattern detection method of printed circuit substrate
JPS5780546A (en) * 1980-11-07 1982-05-20 Nippon Kogaku Kk <Nikon> Detecting device for foreign substance

Also Published As

Publication number Publication date
JPS59152625A (ja) 1984-08-31

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