JPH0332418U - - Google Patents

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Publication number
JPH0332418U
JPH0332418U JP9225489U JP9225489U JPH0332418U JP H0332418 U JPH0332418 U JP H0332418U JP 9225489 U JP9225489 U JP 9225489U JP 9225489 U JP9225489 U JP 9225489U JP H0332418 U JPH0332418 U JP H0332418U
Authority
JP
Japan
Prior art keywords
wafer
wet
semiconductor wafers
liquid processing
holders
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9225489U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9225489U priority Critical patent/JPH0332418U/ja
Publication of JPH0332418U publication Critical patent/JPH0332418U/ja
Pending legal-status Critical Current

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  • Weting (AREA)

Description

【図面の簡単な説明】
第１図は本考案一実施例に係るウエツト処理装
置の斜視図、第２図から第５図は何れも本考案の
ウエツト処理装置による半導体ウエハのウエツト
処理を順を追つて説明する一部断面で示す側面図
、第６図は従来のウエツト処理装置を一部断面で
示す側面図である。 １……ウエハホルダ、１１……移動手段、３…
…ウエハボート、２１，２２……液処理槽、Ｗ…
…半導体ウエハ。

Claims (1)

  1. 【実用新案登録請求の範囲】 複数の液処理槽の上方を水平方向に移動自在と
    する移動手段を有し、複数枚の半導体ウエハを保
    持離反自在とするウエハホルダと、 上記各液処理槽上にそれぞれ配置され、上記ウ
    エハホルダに保持された半導体ウエハを受取つて
    液処理槽内でのウエツト処理後に上記ウエハホル
    ダに受渡すために上下動自在となつたウエハボー
    トとよりなるウエツト処理装置。
JP9225489U 1989-08-04 1989-08-04 Pending JPH0332418U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9225489U JPH0332418U (ja) 1989-08-04 1989-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9225489U JPH0332418U (ja) 1989-08-04 1989-08-04

Publications (1)

Publication Number Publication Date
JPH0332418U true JPH0332418U (ja) 1991-03-29

Family

ID=31641692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9225489U Pending JPH0332418U (ja) 1989-08-04 1989-08-04

Country Status (1)

Country Link
JP (1) JPH0332418U (ja)

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