JPH0390445U - - Google Patents

Info

Publication number
JPH0390445U
JPH0390445U JP15235589U JP15235589U JPH0390445U JP H0390445 U JPH0390445 U JP H0390445U JP 15235589 U JP15235589 U JP 15235589U JP 15235589 U JP15235589 U JP 15235589U JP H0390445 U JPH0390445 U JP H0390445U
Authority
JP
Japan
Prior art keywords
holding groove
groove pitch
carrier
boat
pusher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15235589U
Other languages
English (en)
Other versions
JPH0648851Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989152355U priority Critical patent/JPH0648851Y2/ja
Publication of JPH0390445U publication Critical patent/JPH0390445U/ja
Application granted granted Critical
Publication of JPH0648851Y2 publication Critical patent/JPH0648851Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示すウエーハ立替
機のホルダおよびプツシヤを示す斜視図、第２図
はその概側面図、第３図はウエーハを立てて並べ
るキヤリアの斜視図、第４図は従来のウエーハ立
替機を説明する概念図、第５図はそのホルダの斜
視図、第６図はそのプツシヤの斜視図である。 １……ウエーハ、４……プツシヤ、４ａ……保
持溝、５……ホルダ、６……テーパ溝（保持溝）
、９……キヤリア、１０ｂ，１１ｂ……寸動駆動
部。

Claims (1)

  1. 【実用新案登録請求の範囲】 半導体ウエーハを多数搭載するキヤリアあるい
    はボート間で、半導体ウエーハをプツシヤの突上
    げ動作により、キヤリアあるいはボートの上方に
    配置したホルダへ一旦収納・経由させて、移し替
    える装置において、 上記プツシヤおよびホルダのウエーハ保持溝ピ
    ツチを、キヤリアあるいはボートの保持溝ピツチ
    の整数倍とするとともに、ホルダへ一旦ウエーハ
    を収納時と、収納後プツシヤにてホルダより取出
    し時とで、使用保持溝を異ならせるように、プツ
    シヤおよびホルダを寸動移送自在としたことを特
    徴とするウエーハ立替機。
JP1989152355U 1989-12-27 1989-12-27 ウェーハ立替機 Expired - Lifetime JPH0648851Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989152355U JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989152355U JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Publications (2)

Publication Number Publication Date
JPH0390445U true JPH0390445U (ja) 1991-09-13
JPH0648851Y2 JPH0648851Y2 (ja) 1994-12-12

Family

ID=31698623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989152355U Expired - Lifetime JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Country Status (1)

Country Link
JP (1) JPH0648851Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280630A (ja) * 1985-06-06 1986-12-11 Toshiba Corp 半導体ウエハ移送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280630A (ja) * 1985-06-06 1986-12-11 Toshiba Corp 半導体ウエハ移送装置

Also Published As

Publication number Publication date
JPH0648851Y2 (ja) 1994-12-12

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