JPH0331780B2 - - Google Patents

Info

Publication number
JPH0331780B2
JPH0331780B2 JP58132124A JP13212483A JPH0331780B2 JP H0331780 B2 JPH0331780 B2 JP H0331780B2 JP 58132124 A JP58132124 A JP 58132124A JP 13212483 A JP13212483 A JP 13212483A JP H0331780 B2 JPH0331780 B2 JP H0331780B2
Authority
JP
Japan
Prior art keywords
resistance
thin film
tantalum
chromium
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58132124A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6024343A (ja
Inventor
Yoshio Hara
Masamitsu Saito
Hideyuki Suzuki
Masaru Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAISEE KK
Original Assignee
TAISEE KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TAISEE KK filed Critical TAISEE KK
Priority to JP58132124A priority Critical patent/JPS6024343A/ja
Publication of JPS6024343A publication Critical patent/JPS6024343A/ja
Publication of JPH0331780B2 publication Critical patent/JPH0331780B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
JP58132124A 1983-07-20 1983-07-20 金属薄膜抵抗体 Granted JPS6024343A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58132124A JPS6024343A (ja) 1983-07-20 1983-07-20 金属薄膜抵抗体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58132124A JPS6024343A (ja) 1983-07-20 1983-07-20 金属薄膜抵抗体

Publications (2)

Publication Number Publication Date
JPS6024343A JPS6024343A (ja) 1985-02-07
JPH0331780B2 true JPH0331780B2 (enrdf_load_stackoverflow) 1991-05-08

Family

ID=15073966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58132124A Granted JPS6024343A (ja) 1983-07-20 1983-07-20 金属薄膜抵抗体

Country Status (1)

Country Link
JP (1) JPS6024343A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277436A (ja) * 1985-09-30 1987-04-09 Susumu Kogyo Kk 電気抵抗材料およびそれを用いた薄膜素子

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58153752A (ja) * 1982-03-08 1983-09-12 Takeshi Masumoto Ｎｉ−Ｃｒ系合金材料

Also Published As

Publication number Publication date
JPS6024343A (ja) 1985-02-07

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