JPH045241B2 - - Google Patents

Info

Publication number
JPH045241B2
JPH045241B2 JP58136367A JP13636783A JPH045241B2 JP H045241 B2 JPH045241 B2 JP H045241B2 JP 58136367 A JP58136367 A JP 58136367A JP 13636783 A JP13636783 A JP 13636783A JP H045241 B2 JPH045241 B2 JP H045241B2
Authority
JP
Japan
Prior art keywords
resistance
thin film
tantalum
chromium
temperature coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58136367A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6027103A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58136367A priority Critical patent/JPS6027103A/ja
Publication of JPS6027103A publication Critical patent/JPS6027103A/ja
Publication of JPH045241B2 publication Critical patent/JPH045241B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Adjustable Resistors (AREA)
JP58136367A 1983-07-25 1983-07-25 金属薄膜抵抗体 Granted JPS6027103A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58136367A JPS6027103A (ja) 1983-07-25 1983-07-25 金属薄膜抵抗体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58136367A JPS6027103A (ja) 1983-07-25 1983-07-25 金属薄膜抵抗体

Publications (2)

Publication Number Publication Date
JPS6027103A JPS6027103A (ja) 1985-02-12
JPH045241B2 true JPH045241B2 (enrdf_load_stackoverflow) 1992-01-30

Family

ID=15173505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58136367A Granted JPS6027103A (ja) 1983-07-25 1983-07-25 金属薄膜抵抗体

Country Status (1)

Country Link
JP (1) JPS6027103A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4622522B2 (ja) * 2005-01-07 2011-02-02 住友金属鉱山株式会社 金属抵抗体材料、抵抗薄膜、スパッタリングターゲット、薄膜抵抗器およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58119601A (ja) * 1982-01-08 1983-07-16 株式会社東芝 抵抗体

Also Published As

Publication number Publication date
JPS6027103A (ja) 1985-02-12

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