JPH0330640Y2 - - Google Patents

Info

Publication number
JPH0330640Y2
JPH0330640Y2 JP1986101036U JP10103686U JPH0330640Y2 JP H0330640 Y2 JPH0330640 Y2 JP H0330640Y2 JP 1986101036 U JP1986101036 U JP 1986101036U JP 10103686 U JP10103686 U JP 10103686U JP H0330640 Y2 JPH0330640 Y2 JP H0330640Y2
Authority
JP
Japan
Prior art keywords
section
vacuum pressure
detection device
ejector pump
air ejector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986101036U
Other languages
English (en)
Japanese (ja)
Other versions
JPS637299U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986101036U priority Critical patent/JPH0330640Y2/ja
Publication of JPS637299U publication Critical patent/JPS637299U/ja
Application granted granted Critical
Publication of JPH0330640Y2 publication Critical patent/JPH0330640Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Jet Pumps And Other Pumps (AREA)
JP1986101036U 1986-06-30 1986-06-30 Expired JPH0330640Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986101036U JPH0330640Y2 (enrdf_load_stackoverflow) 1986-06-30 1986-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986101036U JPH0330640Y2 (enrdf_load_stackoverflow) 1986-06-30 1986-06-30

Publications (2)

Publication Number Publication Date
JPS637299U JPS637299U (enrdf_load_stackoverflow) 1988-01-18
JPH0330640Y2 true JPH0330640Y2 (enrdf_load_stackoverflow) 1991-06-27

Family

ID=30971409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986101036U Expired JPH0330640Y2 (enrdf_load_stackoverflow) 1986-06-30 1986-06-30

Country Status (1)

Country Link
JP (1) JPH0330640Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004031924B4 (de) * 2004-06-23 2006-05-04 J. Schmalz Gmbh Vorrichtung zum Erzeugen eines Unterdrucks
US7313966B2 (en) * 2004-12-14 2008-01-01 Brooks Automation, Inc. Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure
JP6174768B1 (ja) * 2016-04-18 2017-08-02 經登企業股▲フン▼有限公司 デジタル圧力計及び制御システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112593U (ja) * 1983-01-20 1984-07-30 オリオン機械株式会社 吸着部の真空圧検知機能付き真空発生装置

Also Published As

Publication number Publication date
JPS637299U (enrdf_load_stackoverflow) 1988-01-18

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