JPH0327353B2 - - Google Patents
Info
- Publication number
- JPH0327353B2 JPH0327353B2 JP58225915A JP22591583A JPH0327353B2 JP H0327353 B2 JPH0327353 B2 JP H0327353B2 JP 58225915 A JP58225915 A JP 58225915A JP 22591583 A JP22591583 A JP 22591583A JP H0327353 B2 JPH0327353 B2 JP H0327353B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chip
- electronic component
- degree
- type electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manipulator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58225915A JPS60118481A (ja) | 1983-11-30 | 1983-11-30 | 吸着検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58225915A JPS60118481A (ja) | 1983-11-30 | 1983-11-30 | 吸着検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60118481A JPS60118481A (ja) | 1985-06-25 |
| JPH0327353B2 true JPH0327353B2 (enrdf_load_stackoverflow) | 1991-04-15 |
Family
ID=16836875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58225915A Granted JPS60118481A (ja) | 1983-11-30 | 1983-11-30 | 吸着検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60118481A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2629738B2 (ja) * | 1987-09-29 | 1997-07-16 | 松下電器産業株式会社 | 部品吸着検出装置 |
| JPH0727119Y2 (ja) * | 1987-10-23 | 1995-06-21 | 豊田合成株式会社 | 残材吸着装置 |
| WO1993004963A1 (en) * | 1991-09-09 | 1993-03-18 | Smc Kabushiki Kaisha | Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49134056A (enrdf_load_stackoverflow) * | 1973-04-25 | 1974-12-24 |
-
1983
- 1983-11-30 JP JP58225915A patent/JPS60118481A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60118481A (ja) | 1985-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0327353B2 (enrdf_load_stackoverflow) | ||
| CN207096098U (zh) | 一种高精度红外检漏仪 | |
| CN110632424B (zh) | 一种电磁阀及电磁阀线圈用便携式检测设备 | |
| CN201259887Y (zh) | 丢失芯片的检测装置 | |
| US20040251344A1 (en) | Pressure sensing system | |
| JP2695754B2 (ja) | エアーフィルタのリーク検査方法 | |
| CN115790736A (zh) | 一种用于检测旋进漩涡频率信号的传感器 | |
| CN210003576U (zh) | 一种滤网检测设备和风机系统 | |
| JPH0572067A (ja) | 圧力値設定方法 | |
| CN220230788U (zh) | 一种用于空调管路的检堵设备 | |
| CN110681268A (zh) | 一种气体净化膜接触角动态检测系统及方法 | |
| JPH03232513A (ja) | エアーフィルタの寿命検知装置 | |
| JPH0346518A (ja) | 流速測定装置 | |
| CN215493031U (zh) | 一种空气过滤器滤材性能检测装置 | |
| JPH0278926A (ja) | 圧力検出装置 | |
| CN219104243U (zh) | 一种基于热式mems芯片的微压差传感器 | |
| CN210572086U (zh) | 一种利用单氧传感器测量烟气含湿量的装置 | |
| JPH10213533A (ja) | 粒子濃度計測装置 | |
| JP2546958Y2 (ja) | 吸引式煙検出装置 | |
| JPS6314612B2 (enrdf_load_stackoverflow) | ||
| JPS639839A (ja) | 微粒子検知方法 | |
| JPS58158536A (ja) | 送風状態検出装置 | |
| US7240561B2 (en) | Process adapter | |
| JPS6238215A (ja) | フイルタの目詰り検知装置 | |
| JP2824857B2 (ja) | 微粒子計測システムの誤差補正方式 |