JPH0329453B2 - - Google Patents

Info

Publication number
JPH0329453B2
JPH0329453B2 JP1568786A JP1568786A JPH0329453B2 JP H0329453 B2 JPH0329453 B2 JP H0329453B2 JP 1568786 A JP1568786 A JP 1568786A JP 1568786 A JP1568786 A JP 1568786A JP H0329453 B2 JPH0329453 B2 JP H0329453B2
Authority
JP
Japan
Prior art keywords
vacuum
gate valve
vacuum processing
container
transportation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1568786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62176532A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1568786A priority Critical patent/JPS62176532A/ja
Publication of JPS62176532A publication Critical patent/JPS62176532A/ja
Publication of JPH0329453B2 publication Critical patent/JPH0329453B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Packages (AREA)
JP1568786A 1986-01-29 1986-01-29 真空処理装置の輸送装置 Granted JPS62176532A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1568786A JPS62176532A (ja) 1986-01-29 1986-01-29 真空処理装置の輸送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1568786A JPS62176532A (ja) 1986-01-29 1986-01-29 真空処理装置の輸送装置

Publications (2)

Publication Number Publication Date
JPS62176532A JPS62176532A (ja) 1987-08-03
JPH0329453B2 true JPH0329453B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-24

Family

ID=11895664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1568786A Granted JPS62176532A (ja) 1986-01-29 1986-01-29 真空処理装置の輸送装置

Country Status (1)

Country Link
JP (1) JPS62176532A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS62176532A (ja) 1987-08-03

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