JPH0329453B2 - - Google Patents
Info
- Publication number
- JPH0329453B2 JPH0329453B2 JP1568786A JP1568786A JPH0329453B2 JP H0329453 B2 JPH0329453 B2 JP H0329453B2 JP 1568786 A JP1568786 A JP 1568786A JP 1568786 A JP1568786 A JP 1568786A JP H0329453 B2 JPH0329453 B2 JP H0329453B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- gate valve
- vacuum processing
- container
- transportation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000011109 contamination Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Packages (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、真空処理装置の輸送装置に係り、特
に真空容器を真空ベーク処理必要な真空処理装置
を輸送するのに好適な真空処理装置の輸送装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a transportation device for a vacuum processing device, and particularly to a vacuum processing device suitable for transporting a vacuum processing device that requires vacuum baking of a vacuum container. It relates to transportation equipment.
真空容器を真空ベーク処理必要、即ち、真空容
器内を超高真空とする必要がある真空処理装置と
しては、例えば、分子線エピタキシー装置が挙げ
られる。分子線エピタキシー装置としては、例え
ば、特開昭59−124710号公報に記載されているよ
うなものが知られている。
An example of a vacuum processing apparatus that requires a vacuum baking process on a vacuum container, that is, an ultra-high vacuum inside the vacuum container, is a molecular beam epitaxy apparatus. As a molecular beam epitaxy apparatus, for example, one described in Japanese Patent Application Laid-open No. 124710/1984 is known.
一般に、このような真空処理装置の製造場所と
使用場所とは異なり離れており、製造場所から使
用場所へ輸送する必要がある。しかし、この輸送
時において真空容器内の大気による汚染をいかに
して良好に防止するかについては充分に配慮され
ているとはいえない。 Generally, the manufacturing site and the usage site of such a vacuum processing apparatus are different from each other and are separated from each other, and it is necessary to transport the vacuum processing apparatus from the manufacturing site to the usage site. However, it cannot be said that sufficient consideration has been given to how to effectively prevent atmospheric contamination within the vacuum container during this transportation.
真空処理装置の製造場所から使用場所への輸送
時において真空容器内の大気による汚染防止対策
が不充分である場合、真空処理装置の使用場所へ
の据付後、真空容器の真空ベーク処理を製造時と
同様に再び実施しなければ、真空容器内を超高真
空に排気できないといつた問題がある。
If measures to prevent atmospheric contamination inside the vacuum container are insufficient during transport of the vacuum processing equipment from the manufacturing location to the usage location, vacuum baking of the vacuum container may be performed at the time of manufacture after the vacuum processing equipment is installed at the usage location. There is a problem in that the inside of the vacuum container cannot be evacuated to an ultra-high vacuum unless the same procedure is repeated.
本発明の目的は、真空処理装置の製造場所から
使用場所への輸送時における真空容器内の大気に
よる汚染を良好に防止することで、使用場所での
真空処理装置据付け後の真空容器の真空ベーク処
理を実施することなしに真空容器内を超高真空に
排気できる真空処理装置の輸送装置を提供するこ
とにある。 An object of the present invention is to effectively prevent atmospheric contamination inside a vacuum container during transportation of a vacuum processing device from a manufacturing site to a usage site, and to prevent vacuum baking of the vacuum container after the vacuum processing device is installed at the usage site. It is an object of the present invention to provide a transportation device for a vacuum processing apparatus that can evacuate the inside of a vacuum container to an ultra-high vacuum without performing processing.
上記目的は、真空容器と真空排気装置と駆動手
段で作動する仕切弁とを有する真空処理装置を輸
送する装置で、前記駆動手段と切換え使用可能で
前記真空処理装置の輸送時に前記真空容器の真空
を封止し維持可能に前記仕切弁を作動させる駆動
手段を別途具備することで達成される。
The above object is an apparatus for transporting a vacuum processing apparatus having a vacuum container, a vacuum evacuation device, and a gate valve operated by a driving means, which is capable of being used interchangeably with the driving means, and is capable of evacuating the vacuum container when transporting the vacuum processing apparatus. This is achieved by separately providing a driving means for operating the gate valve in a manner that allows the gate valve to be sealed and maintained.
製造場所で真空容器は真空ベーク処理され該真
空容器の真空は製造場所に設置されている駆動手
段で作動する仕切弁で封止される。真空処理装置
の輸送時においては、製造場所に設置されている
駆動手段と輸送装置が別途具備した駆動手段とが
切換えられ該駆動手段で仕切弁は引続き作動させ
られ、これにより真空容器の真空は封止され維持
される。その後、真空処理装置の使用場所での据
付時に輸送装置が別途具備した駆動手段と使用場
所に設置されている駆動手段とが切換えられ該駆
動手段で仕切弁は引続き作動させられて使用場所
で据付けられた真空処理装置の真空容器の真空は
封止される。
The vacuum container is subjected to a vacuum baking process at the manufacturing site, and the vacuum in the vacuum container is sealed by a gate valve operated by a drive means installed at the manufacturing site. When transporting the vacuum processing equipment, the driving means installed at the manufacturing site and the driving means separately provided in the transportation equipment are switched, and the gate valve is continuously operated by the driving means, thereby reducing the vacuum in the vacuum container. sealed and maintained. Thereafter, when the vacuum processing equipment is installed at the place of use, the drive means separately provided in the transportation equipment and the drive means installed at the place of use are switched, and the gate valve is continuously operated by the drive means and installed at the place of use. The vacuum chamber of the vacuum processing equipment is sealed.
このように、真空処理装置の輸送時において真
空容器の真空は封止され維持されるので、真空容
器内への大気の流入がなく真空容器内の大気によ
る汚染が良好に防止される。 In this manner, the vacuum in the vacuum container is sealed and maintained during transportation of the vacuum processing apparatus, so that air does not flow into the vacuum container, and contamination by the air inside the vacuum container is effectively prevented.
以下、本発明の一実施例を図面により説明す
る。
An embodiment of the present invention will be described below with reference to the drawings.
図面で、副真空槽８の入口と、副真空槽８と主
真空槽９の間と上記真空槽８，９と主排気ポンプ
６の間とにエアーシリンダー３により動作する仕
切弁４を具備し、エアーシリンダー３に圧縮空気
を送る圧力調整器２を具備した圧縮空気ボンベ１
を設け、圧縮空気ボンベ１とエアーシリンダー３
との間に手動弁７を設けると共に、工場側からの
圧縮空気とエアーシリンダー３との間に手動弁５
を設けている。副真空槽８、主真空槽９を真空ベ
ーク処理して超高真空排気後に手動弁７を開け、
仕切弁４を閉じて工場側からの圧縮空気を手動弁
５で閉じる。工場側からの圧縮空気パイプを取は
ずせば副真空槽８、主真空槽９に大気を入れるこ
となく真空状態のままで使用場所へ輸送できる。
使用場所での据付後は、使用場所の建屋側から圧
縮空気の供給を受け手動弁５を開け、圧縮空気ボ
ンベ１側の手動弁７を閉じる。 In the drawing, a gate valve 4 operated by an air cylinder 3 is provided at the inlet of the sub-vacuum tank 8, between the sub-vacuum tank 8 and the main vacuum tank 9, and between the vacuum tanks 8, 9 and the main exhaust pump 6. , a compressed air cylinder 1 equipped with a pressure regulator 2 that sends compressed air to an air cylinder 3
A compressed air cylinder 1 and an air cylinder 3 are installed.
A manual valve 7 is provided between the compressed air from the factory and the air cylinder 3.
has been established. After vacuum baking the sub-vacuum tank 8 and main vacuum tank 9 and evacuation to an ultra-high vacuum, open the manual valve 7.
The gate valve 4 is closed and the compressed air from the factory side is closed using the manual valve 5. If the compressed air pipe from the factory side is removed, the sub-vacuum tank 8 and the main vacuum tank 9 can be transported to the place of use in a vacuum state without introducing air into the main vacuum tank 9.
After installation at the place of use, compressed air is supplied from the building side of the place of use, the manual valve 5 is opened, and the manual valve 7 on the side of the compressed air cylinder 1 is closed.
本実施例では、次のような効果がある。 This embodiment has the following effects.
(1) 真空槽内への大気の混入なく輸送できるの
で、使用場所での据付け後に真空槽を再び真空
ベークすることなしに真空槽内を超高真空排気
できる。(1) Since the vacuum chamber can be transported without air entering the chamber, the inside of the vacuum chamber can be evacuated to an ultra-high vacuum without having to vacuum bake the chamber again after installation at the site of use.
(2) 使用場所での据付け後に真空槽を再び真空ベ
ークする必要がないので、真空立上げ時間をこ
の分だけ短縮することができる。(2) Since there is no need to vacuum bake the vacuum chamber again after installation at the place of use, the vacuum start-up time can be shortened by this amount.
なお、本実施例では、仕切弁を、圧縮空気力に
より作動する仕切弁としているが、この他に、電
磁力や油圧力により作動する仕切弁を用いても良
い。また、仕切弁をモータで作動する弁とし該モ
ータに電気供給するバツテリーを輸送装置に設け
るようにしても良い。 In this embodiment, the gate valve is a gate valve operated by compressed air force, but other gate valves operated by electromagnetic force or hydraulic pressure may also be used. Alternatively, the gate valve may be operated by a motor, and the transportation device may be provided with a battery that supplies electricity to the motor.
本発明によれば、真空処理装置の製造場所から
使用場所への輸送時における真空容器内の大気に
よる汚染を良好に防止できるので、使用場所での
真空処理装置据付け後の真空容器の真空ベーク処
理を実施することなしに該真空容器内を超高真空
に排気できるという効果がある。
According to the present invention, it is possible to satisfactorily prevent air contamination inside the vacuum container during transportation from the manufacturing site to the usage site of the vacuum processing equipment, so vacuum baking of the vacuum container after the vacuum processing equipment is installed at the usage location is possible. This has the effect that the inside of the vacuum container can be evacuated to an ultra-high vacuum without having to carry out.
図面は、本発明の一実施例の真空処理装置の輸
送装置の構成図である。
１……圧縮空気ボンベ、２……圧力調整器、３
……エアシリンダー、４……仕切弁、５，７……
手動弁、６……主排気ポンプ、８……副真空槽、
９……主真空槽。
The drawing is a configuration diagram of a transportation device of a vacuum processing apparatus according to an embodiment of the present invention. 1... Compressed air cylinder, 2... Pressure regulator, 3
...Air cylinder, 4...Gate valve, 5,7...
Manual valve, 6... Main exhaust pump, 8... Sub-vacuum tank,
9...Main vacuum tank.
Claims (1)
る仕切弁とを有する真空処理装置を輸送する装置
において、前記駆動手段と切換え使用可能で前記
真空処理装置の輸送時に前記真空容器の真空を封
止し維持可能に前記仕切弁を作動させる駆動手段
を別途具備したことを特徴とする真空処理装置の
輸送装置。1. A device for transporting a vacuum processing device having a vacuum container, a vacuum evacuation device, and a gate valve operated by a drive means, which can be used interchangeably with the drive means and seals the vacuum of the vacuum container during transportation of the vacuum processing device. A transportation device for a vacuum processing apparatus, characterized in that the transportation device for a vacuum processing apparatus is further provided with a driving means for operating the gate valve in a manner that maintains the operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1568786A JPS62176532A (en) | 1986-01-29 | 1986-01-29 | Transport device of vacuum treatment apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1568786A JPS62176532A (en) | 1986-01-29 | 1986-01-29 | Transport device of vacuum treatment apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62176532A JPS62176532A (en) | 1987-08-03 |
| JPH0329453B2 true JPH0329453B2 (en) | 1991-04-24 |
Family
ID=11895664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1568786A Granted JPS62176532A (en) | 1986-01-29 | 1986-01-29 | Transport device of vacuum treatment apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62176532A (en) |
-
1986
- 1986-01-29 JP JP1568786A patent/JPS62176532A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62176532A (en) | 1987-08-03 |
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