JPH0328028Y2 - - Google Patents

Info

Publication number
JPH0328028Y2
JPH0328028Y2 JP1985054131U JP5413185U JPH0328028Y2 JP H0328028 Y2 JPH0328028 Y2 JP H0328028Y2 JP 1985054131 U JP1985054131 U JP 1985054131U JP 5413185 U JP5413185 U JP 5413185U JP H0328028 Y2 JPH0328028 Y2 JP H0328028Y2
Authority
JP
Japan
Prior art keywords
thin plate
negative pressure
plate material
suction pad
support rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985054131U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61171744U (US06346242-20020212-C00066.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985054131U priority Critical patent/JPH0328028Y2/ja
Publication of JPS61171744U publication Critical patent/JPS61171744U/ja
Application granted granted Critical
Publication of JPH0328028Y2 publication Critical patent/JPH0328028Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP1985054131U 1985-04-11 1985-04-11 Expired JPH0328028Y2 (US06346242-20020212-C00066.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985054131U JPH0328028Y2 (US06346242-20020212-C00066.png) 1985-04-11 1985-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985054131U JPH0328028Y2 (US06346242-20020212-C00066.png) 1985-04-11 1985-04-11

Publications (2)

Publication Number Publication Date
JPS61171744U JPS61171744U (US06346242-20020212-C00066.png) 1986-10-24
JPH0328028Y2 true JPH0328028Y2 (US06346242-20020212-C00066.png) 1991-06-17

Family

ID=30575617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985054131U Expired JPH0328028Y2 (US06346242-20020212-C00066.png) 1985-04-11 1985-04-11

Country Status (1)

Country Link
JP (1) JPH0328028Y2 (US06346242-20020212-C00066.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0676145B2 (ja) * 1987-03-28 1994-09-28 積水化成品工業株式会社 スタツク成形品の取出し方法、及び装置並びに取出吸着機構
CN102202994B (zh) * 2009-08-31 2014-03-12 旭硝子株式会社 剥离装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016443B2 (ja) * 1974-06-27 1985-04-25 チエコスロヴンスカ、アカデミー、ヴエド アシルオキシアルキルメタクリレ−ト類の重合体または共重合体の製造方法
JPS626040U (US06346242-20020212-C00066.png) * 1985-06-26 1987-01-14

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115874U (US06346242-20020212-C00066.png) * 1973-01-31 1974-10-03
JPS6016443U (ja) * 1983-07-12 1985-02-04 井上産業株式会社 板状素材の剥離装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016443B2 (ja) * 1974-06-27 1985-04-25 チエコスロヴンスカ、アカデミー、ヴエド アシルオキシアルキルメタクリレ−ト類の重合体または共重合体の製造方法
JPS626040U (US06346242-20020212-C00066.png) * 1985-06-26 1987-01-14

Also Published As

Publication number Publication date
JPS61171744U (US06346242-20020212-C00066.png) 1986-10-24

Similar Documents

Publication Publication Date Title
JPH0328028Y2 (US06346242-20020212-C00066.png)
JPH0622199B2 (ja) 薄膜圧着方法及び薄膜圧着装置
CN216389308U (zh) 一种晶圆吸附机构及称重装置
CN219029898U (zh) 自带钢化膜和排气滑槽并能除尘的贴膜器
JPH0446336Y2 (US06346242-20020212-C00066.png)
JPS58140919U (ja) 自動供給装置
JP3344807B2 (ja) バキュームパッド及び板材搬送装置
JPS6011571Y2 (ja) 接触装置
JP2898300B2 (ja) ウェーハ取り扱い装置
JPS5819555Y2 (ja) 焼付装置
JPS5819556Y2 (ja) 焼付装置
JP2985013B2 (ja) ネガフィルムの吸着保持法
CN113978103A (zh) 撕膜装置
JPH08264629A (ja) 真空ピンセット
JPS5878673U (ja) 可動構造体
JP2001167757A (ja) テープ貼り付け装置
JP2008075795A (ja) 吸盤シート
JPS6046498B2 (ja) キ−スイツチの可動電極部材の製作方法
JPS5965434U (ja) 照光式メンプレンスイツチ
JPS60145545U (ja) 試料ホルダ位置決め装置
JPH025013B2 (US06346242-20020212-C00066.png)
JPS6185151U (US06346242-20020212-C00066.png)
JPS60187144U (ja) 基板真空吸着構造
JPS58151649U (ja) 接着剤付き弾性シ−ト
JPS60184222U (ja) 感圧スイツチ