JPH0328015B2 - - Google Patents

Info

Publication number
JPH0328015B2
JPH0328015B2 JP56101195A JP10119581A JPH0328015B2 JP H0328015 B2 JPH0328015 B2 JP H0328015B2 JP 56101195 A JP56101195 A JP 56101195A JP 10119581 A JP10119581 A JP 10119581A JP H0328015 B2 JPH0328015 B2 JP H0328015B2
Authority
JP
Japan
Prior art keywords
lens
electron
image
magnification
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56101195A
Other languages
English (en)
Japanese (ja)
Other versions
JPS585956A (ja
Inventor
Kazuo Yotsui
Hiroyuki Kobayashi
Moriki Kubozoe
Shigeto Isagozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56101195A priority Critical patent/JPS585956A/ja
Priority to US06/393,332 priority patent/US4494000A/en
Priority to EP82303426A priority patent/EP0068896B1/en
Priority to DE8282303426T priority patent/DE3277263D1/de
Publication of JPS585956A publication Critical patent/JPS585956A/ja
Publication of JPH0328015B2 publication Critical patent/JPH0328015B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56101195A 1981-07-01 1981-07-01 電子顕微鏡 Granted JPS585956A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56101195A JPS585956A (ja) 1981-07-01 1981-07-01 電子顕微鏡
US06/393,332 US4494000A (en) 1981-07-01 1982-06-29 Image distortion-free, image rotation-free electron microscope
EP82303426A EP0068896B1 (en) 1981-07-01 1982-06-30 Image distortion-free, image rotation-free electron microscope
DE8282303426T DE3277263D1 (en) 1981-07-01 1982-06-30 Image distortion-free, image rotation-free electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56101195A JPS585956A (ja) 1981-07-01 1981-07-01 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS585956A JPS585956A (ja) 1983-01-13
JPH0328015B2 true JPH0328015B2 (enrdf_load_stackoverflow) 1991-04-17

Family

ID=14294160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56101195A Granted JPS585956A (ja) 1981-07-01 1981-07-01 電子顕微鏡

Country Status (4)

Country Link
US (1) US4494000A (enrdf_load_stackoverflow)
EP (1) EP0068896B1 (enrdf_load_stackoverflow)
JP (1) JPS585956A (enrdf_load_stackoverflow)
DE (1) DE3277263D1 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614142A (ja) * 1984-06-16 1986-01-10 Jeol Ltd 電子顕微鏡
JPS6149363A (ja) * 1984-08-16 1986-03-11 Internatl Precision Inc 電子顕微鏡の結像系
JPH0815060B2 (ja) * 1985-06-12 1996-02-14 株式会社日立製作所 透過形電子顕微鏡
US4907287A (en) * 1985-10-16 1990-03-06 Hitachi, Ltd. Image correction system for scanning electron microscope
JP2702114B2 (ja) * 1986-10-03 1998-01-21 株式会社日立製作所 電子顕微鏡
JPH0766770B2 (ja) * 1989-03-10 1995-07-19 株式会社日立製作所 電子線照射装置
JPH0594798A (ja) * 1991-05-21 1993-04-16 Jeol Ltd 焦点深度切り換え可能な電子顕微鏡等の電子光学観察装置
JP3453247B2 (ja) * 1996-05-23 2003-10-06 日本電子株式会社 走査電子顕微鏡およびその制御方法
US5627373A (en) * 1996-06-17 1997-05-06 Hewlett-Packard Company Automatic electron beam alignment and astigmatism correction in scanning electron microscope
JP3688160B2 (ja) * 1999-09-17 2005-08-24 株式会社日立製作所 走査電子顕微鏡
WO2009123311A1 (ja) * 2008-04-04 2009-10-08 株式会社日立製作所 回折像取得方法、及び荷電粒子線装置
CN111174765B (zh) * 2020-02-24 2021-08-13 北京航天飞行控制中心 基于视觉引导的行星车目标探测控制方法及装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2418349A (en) * 1945-12-13 1947-04-01 Rca Corp Method of and means for correcting for distortion in electron lens systems
NL98715C (enrdf_load_stackoverflow) * 1953-09-04
US3327112A (en) * 1964-02-25 1967-06-20 Hitachi Ltd Electron microscope having a light metal layer on the interior walls to prevent x-ray generation
GB1191191A (en) * 1968-05-08 1970-05-06 Hitachi Ltd Improvements in Electron Microscopes
US3715582A (en) * 1970-02-13 1973-02-06 Hitachi Ltd Method of and apparatus for attaining focusing following variation in magnification in electron microscope
NL7114692A (enrdf_load_stackoverflow) * 1970-10-28 1972-05-03
JPS5213713B2 (enrdf_load_stackoverflow) * 1971-12-15 1977-04-16
JPS4895768A (enrdf_load_stackoverflow) * 1972-03-17 1973-12-07
JPS5618351B2 (enrdf_load_stackoverflow) * 1972-04-24 1981-04-28
JPS526073A (en) * 1975-07-04 1977-01-18 Hitachi Ltd Magnetic field type electronic lens
JPS54163671A (en) * 1978-06-15 1979-12-26 Nippon Electron Optics Lab Electron microscope that have few rotation of image

Also Published As

Publication number Publication date
JPS585956A (ja) 1983-01-13
US4494000A (en) 1985-01-15
DE3277263D1 (en) 1987-10-15
EP0068896A2 (en) 1983-01-05
EP0068896A3 (en) 1983-05-25
EP0068896B1 (en) 1987-09-09

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