JPS5213713B2 - - Google Patents

Info

Publication number
JPS5213713B2
JPS5213713B2 JP46100977A JP10097771A JPS5213713B2 JP S5213713 B2 JPS5213713 B2 JP S5213713B2 JP 46100977 A JP46100977 A JP 46100977A JP 10097771 A JP10097771 A JP 10097771A JP S5213713 B2 JPS5213713 B2 JP S5213713B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46100977A
Other languages
Japanese (ja)
Other versions
JPS4866364A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46100977A priority Critical patent/JPS5213713B2/ja
Priority to DE19722261497 priority patent/DE2261497C3/de
Priority to US00315455A priority patent/US3851172A/en
Publication of JPS4866364A publication Critical patent/JPS4866364A/ja
Publication of JPS5213713B2 publication Critical patent/JPS5213713B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58—Arrangements for focusing or reflecting ray or beam
    • H01J29/64—Magnetic lenses
    • H01J29/66—Magnetic lenses using electromagnetic means only

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP46100977A 1971-12-15 1971-12-15 Expired JPS5213713B2 (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP46100977A JPS5213713B2 (enrdf_load_stackoverflow) 1971-12-15 1971-12-15
DE19722261497 DE2261497C3 (de) 1971-12-15 1972-12-15 Magnetische Verbundlinse
US00315455A US3851172A (en) 1971-12-15 1972-12-15 Compound electron lens for electron microscope and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46100977A JPS5213713B2 (enrdf_load_stackoverflow) 1971-12-15 1971-12-15

Publications (2)

Publication Number Publication Date
JPS4866364A JPS4866364A (enrdf_load_stackoverflow) 1973-09-11
JPS5213713B2 true JPS5213713B2 (enrdf_load_stackoverflow) 1977-04-16

Family

ID=14288392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46100977A Expired JPS5213713B2 (enrdf_load_stackoverflow) 1971-12-15 1971-12-15

Country Status (2)

Country Link
US (1) US3851172A (enrdf_load_stackoverflow)
JP (1) JPS5213713B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121540U (enrdf_load_stackoverflow) * 1979-02-19 1980-08-28

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1420803A (en) * 1973-06-28 1976-01-14 Ass Elect Ind Electron microscopes
JPS524746U (enrdf_load_stackoverflow) * 1975-06-24 1977-01-13
JPS52104359U (enrdf_load_stackoverflow) * 1976-02-06 1977-08-08
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens
JPS585956A (ja) * 1981-07-01 1983-01-13 Hitachi Ltd 電子顕微鏡
US4585942A (en) * 1983-03-17 1986-04-29 Jeol Ltd. Transmission electron microscope
FR2597259A1 (fr) * 1986-04-15 1987-10-16 Thomson Csf Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon
US5442182A (en) * 1992-11-06 1995-08-15 Hitachi, Ltd. Electron lens
US6627899B2 (en) * 1998-05-27 2003-09-30 Nikon Corporation Magnetic lenses, charged-particle-beam optical systems, and charged-particle-beam pattern-transfer apparatus
US6608308B1 (en) * 1999-05-26 2003-08-19 Nikon Corporation Electrostatic lens systems for secondary-electron mapping-projection apparatus, and mapping-projection apparatus and methods comprising same
US6624426B2 (en) * 2000-12-11 2003-09-23 Schlumberger Technologies Inc. Split magnetic lens for controlling a charged particle beam
US7078994B2 (en) * 2003-02-18 2006-07-18 Glenn Henry Martin Constant power and temperature coil
GB2412232A (en) * 2004-03-15 2005-09-21 Ims Nanofabrication Gmbh Particle-optical projection system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2373328A (en) * 1943-06-07 1945-04-10 Adel Prec Products Corp Wrap-around wire supporting clip
US2418349A (en) * 1945-12-13 1947-04-01 Rca Corp Method of and means for correcting for distortion in electron lens systems
US2819403A (en) * 1954-07-01 1958-01-07 Rca Corp Electron microscopy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121540U (enrdf_load_stackoverflow) * 1979-02-19 1980-08-28

Also Published As

Publication number Publication date
DE2261497B2 (de) 1976-09-23
US3851172A (en) 1974-11-26
JPS4866364A (enrdf_load_stackoverflow) 1973-09-11
DE2261497A1 (de) 1973-07-26

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