GB1420803A - Electron microscopes - Google Patents

Electron microscopes

Info

Publication number
GB1420803A
GB1420803A GB3076473A GB3076473A GB1420803A GB 1420803 A GB1420803 A GB 1420803A GB 3076473 A GB3076473 A GB 3076473A GB 3076473 A GB3076473 A GB 3076473A GB 1420803 A GB1420803 A GB 1420803A
Authority
GB
United Kingdom
Prior art keywords
sample
condenser
june
detector
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3076473A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB3076473A priority Critical patent/GB1420803A/en
Priority to NL7408601A priority patent/NL7408601A/xx
Priority to US483126A priority patent/US3924126A/en
Priority to DE2430696A priority patent/DE2430696A1/en
Priority to JP49073741A priority patent/JPS5034462A/ja
Publication of GB1420803A publication Critical patent/GB1420803A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Abstract

1420803 Electron microscope lenses ASSOCIATED ELECTRICAL INDUSTRIES Ltd 26 June 1974 [28 June 1973] 30764/73 Heading H1D In a transmission electron microscope and X- ray probe analyser the electrons diverging from the image of the tungsten filament thermionic cathode formed by a first condenser lens (11, Fig. 1, not shown) enter from above and are focused on to a sample on support 33, forming an image of the filament source 100 nm in size, by means of the gap field in the upper part of combined second condenser and objective lens 12. Each part comprises a gapped iron magnetic circuit 23, 29 or 24, 30 having annular symmetry and surrounding an energizing winding 31 or 32, the currents being independently adjustable and the radial fields produced in dished iron plate 25 tending to cancel. The condenser component 23 holds four pairs of deflector coils 37 (only two shown) for adjustment of the beam position or for scanning. X-rays emitted by the electron irradiated area of the sample in holder 33 within the lower gap produce a signal from detector 38, its siting in direct line from the sample necessitating enlargement of hole 26. In an alternative embodiment hole 26 is reduced, the X-rays emerging through oblique holes 39 arranged symmetrically, one or more pointing at detector or detectors 38.
GB3076473A 1973-06-28 1973-06-28 Electron microscopes Expired GB1420803A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB3076473A GB1420803A (en) 1973-06-28 1973-06-28 Electron microscopes
NL7408601A NL7408601A (en) 1973-06-28 1974-06-26
US483126A US3924126A (en) 1973-06-28 1974-06-26 Electron microscopes
DE2430696A DE2430696A1 (en) 1973-06-28 1974-06-26 ELECTRON MICROSCOPE
JP49073741A JPS5034462A (en) 1973-06-28 1974-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3076473A GB1420803A (en) 1973-06-28 1973-06-28 Electron microscopes

Publications (1)

Publication Number Publication Date
GB1420803A true GB1420803A (en) 1976-01-14

Family

ID=10312780

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3076473A Expired GB1420803A (en) 1973-06-28 1973-06-28 Electron microscopes

Country Status (5)

Country Link
US (1) US3924126A (en)
JP (1) JPS5034462A (en)
DE (1) DE2430696A1 (en)
GB (1) GB1420803A (en)
NL (1) NL7408601A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3201889A1 (en) * 1981-01-30 1982-08-26 Naamloze Vennootschap Philips' Gloeilampenfabrieken, 5621 Eindhoven ELECTRON MICROSCOPE WITH X-RAY DETECTOR
GB2118361A (en) * 1982-03-19 1983-10-26 Int Precision Inc Scanning electron beam apparatus
GB2161018A (en) * 1984-04-17 1986-01-02 Jeol Ltd Electron microscope lenses
GB2238426A (en) * 1989-11-16 1991-05-29 Jeol Ltd Electromagnetic lens.

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (en) * 1975-09-19 1977-03-31 Max Planck Gesellschaft BODY RAY MICROSCOPE WITH RING ZONE SEGMENT IMAGE
GB1594465A (en) * 1977-03-23 1981-07-30 Nat Res Dev Electron beam apparatus
US4475044A (en) * 1979-04-23 1984-10-02 Hitachi, Ltd. Apparatus for focus-deflecting a charged particle beam
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
JP2582114B2 (en) * 1988-04-01 1997-02-19 日本電子株式会社 X-ray analyzer for electron microscope
DE3825103A1 (en) * 1988-07-23 1990-01-25 Zeiss Carl Fa METHOD FOR ILLUMINATING AN OBJECT IN A TRANSMISSION ELECTRON MICROSCOPE
US5079428A (en) * 1989-08-31 1992-01-07 Bell Communications Research, Inc. Electron microscope with an asymmetrical immersion lens
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
JP5222142B2 (en) * 2005-09-06 2013-06-26 カール・ツァイス・エスエムティー・ゲーエムベーハー Particle optics
TWI275118B (en) * 2005-12-09 2007-03-01 Li Bing Huan Sample box of electron microscope for observing a general sample/live cell
US8080791B2 (en) * 2008-12-12 2011-12-20 Fei Company X-ray detector for electron microscope
US8314386B2 (en) * 2010-03-26 2012-11-20 Uchicago Argonne, Llc High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes
DE102010056321B9 (en) * 2010-12-27 2018-03-22 Carl Zeiss Microscopy Gmbh Particle beam microscope
US9520263B2 (en) * 2013-02-11 2016-12-13 Novaray Medical Inc. Method and apparatus for generation of a uniform-profile particle beam

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2323328A (en) * 1940-10-31 1943-07-06 Rca Corp Projection lens for electron microscopes
US2418349A (en) * 1945-12-13 1947-04-01 Rca Corp Method of and means for correcting for distortion in electron lens systems
DE1614126B1 (en) * 1967-02-27 1970-11-19 Max Planck Gesellschaft Corpuscular beam microscope, in particular electron microscope, with a condenser lens formed by the front of an objective lens and a range diaphragm
US3514600A (en) * 1967-11-20 1970-05-26 Parke Davis & Co Flexible conduit means for connecting an electron microscope to a vacuum pump
JPS5213713B2 (en) * 1971-12-15 1977-04-16

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3201889A1 (en) * 1981-01-30 1982-08-26 Naamloze Vennootschap Philips' Gloeilampenfabrieken, 5621 Eindhoven ELECTRON MICROSCOPE WITH X-RAY DETECTOR
GB2118361A (en) * 1982-03-19 1983-10-26 Int Precision Inc Scanning electron beam apparatus
GB2173945A (en) * 1982-03-19 1986-10-22 Int Precision Inc Scanning electron beam apparatus
GB2161018A (en) * 1984-04-17 1986-01-02 Jeol Ltd Electron microscope lenses
GB2161018B (en) * 1984-04-17 1989-06-01 Jeol Ltd Transmission-type electron microscope
GB2238426A (en) * 1989-11-16 1991-05-29 Jeol Ltd Electromagnetic lens.
GB2238426B (en) * 1989-11-16 1994-04-13 Jeol Ltd Electromagnetic lens

Also Published As

Publication number Publication date
NL7408601A (en) 1974-12-31
DE2430696A1 (en) 1975-01-16
US3924126A (en) 1975-12-02
JPS5034462A (en) 1975-04-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee